Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

This is a preview of subscription content, access via your institution.


  1. 1

    Sachs E, Hu A, Ingolfsson A. Run by run process control: combining SPC and feedback control. IEEE Trans Semicond Manufact, 1995, 8: 26–43

    Article  Google Scholar 

  2. 2

    Tan F, Pan T H, Li Z M, et al. Survey on run-to-run control algorithms in high-mix semiconductor manufacturing processes. IEEE Trans Ind Inf, 2015, 11: 1435–1444

    Article  Google Scholar 

  3. 3

    Butler S W, Stefani J A. Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry. IEEE Trans Semicond Manufact, 1994, 7: 193–201

    Article  Google Scholar 

  4. 4

    Tseng S T, Tsung F, Liu P Y. Variable EWMA run-torun controller for drifted processes. IIE Trans, 2007, 39: 291–301

    Article  Google Scholar 

  5. 5

    Kim H, Park J H, Lee K S. A Kalman filter-based R2R control system with parallel stochastic disturbance models for semiconductor manufacturing processes. J Process Control, 2014, 24: 119–124

    Article  Google Scholar 

  6. 6

    Wang Y, Hussein I I. Awareness coverage control over large-scale domains with intermittent communications. IEEE Trans Autom Control, 2010, 55: 1850–1859

    MathSciNet  Article  MATH  Google Scholar 

  7. 7

    Qin S J, Cherry G, Good R, et al. Semiconductor manufacturing process control and monitoring: a fab-wide framework. J Process Control, 2006, 16: 179–191

    Article  Google Scholar 

  8. 8

    Anderson B D O, Moore J B. Detectability and stabilizability of time-varying discrete-time linear systems. SIAM J Control Optim, 1981, 19: 20–32

    MathSciNet  Article  MATH  Google Scholar 

Download references


This work was supported by National Natural Science Foundation of China (Grant Nos. 61603303, 61803309, 61573365, 61833016), Natural Science Basic Research Program of Shaanxi (Grant No. 2017JQ6005), Fundamental Research Funds for the Central Universities (Grant No. G2017KY0008), and Innovation Development Foundation of Loving Students (Grant No. ASNIF2015-1502).

Author information



Corresponding author

Correspondence to Changhua Hu.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Xu, Z., Hu, C. & Hu, J. Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes. Sci. China Inf. Sci. 62, 89201 (2019). https://doi.org/10.1007/s11432-018-9593-1

Download citation