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Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes

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This work was supported by National Natural Science Foundation of China (Grant Nos. 61603303, 61803309, 61573365, 61833016), Natural Science Basic Research Program of Shaanxi (Grant No. 2017JQ6005), Fundamental Research Funds for the Central Universities (Grant No. G2017KY0008), and Innovation Development Foundation of Loving Students (Grant No. ASNIF2015-1502).

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Correspondence to Changhua Hu.

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Xu, Z., Hu, C. & Hu, J. Kalman filtering-based supervisory run-to-run control method for semiconductor diffusion processes. Sci. China Inf. Sci. 62, 89201 (2019).

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