Improvement of thermal stability of nickel germanide using nitrogen plasma pretreatment for germanium-based technology

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Acknowledgements

This work was supported in part by National Natural Science Foundation of China (Grant Nos. 61421005, 60806033, 61534004, 61474004) and National Key Research and Development Plan (Grant No. 2016YFA0200504).

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Correspondence to Xia An or Ru Huang.

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Zhang, B., An, X., Liu, P. et al. Improvement of thermal stability of nickel germanide using nitrogen plasma pretreatment for germanium-based technology. Sci. China Inf. Sci. 61, 109401 (2018). https://doi.org/10.1007/s11432-018-9398-6

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