This paper proposes a novel electrical coupling suppressing and drive closed loop control method for a MEMS gyroscope with feed-forward coupling compensation (FCC) and scalable fuzzy control. Theoretical analysis of the novel method is described in detail, and it is very simple to realize. Experimental results demonstrate that the electrical anti-resonant peaks located at the amplitude-frequency and phase-frequency responses are both eliminated by FCC control, and the height of the amplitude resonant peak increases more than 24 dB over 1800 Hz span. In addition, the overshoot of the transient response with scalable fuzzy control is smaller than 5%, and the settling time is less than 15 ms. The stabilities of the resonant amplitude and phase of the drive-mode velocity with scalable fuzzy control are about 15 ppm and 11 ppm, respectively. The scale factor of the gyroscope is measured to be 33.98 mV/deg/s with nonlinearity about 0.08%. Furthermore, the bias instability of the gyroscope with wavelet analysis is improved to be about 6.3 deg/h from 25.2 deg/h of the gyroscope without wavelet analysis.
(1)提出了一种基于前馈耦合补偿的微机械陀螺电耦合抑制方法; (2)提出了基于尺度收缩模糊控制算法的闭环控制技术; (3)基于小波变换算法来抑制微机械陀螺噪声。
This is a preview of subscription content, access via your institution.
Buy single article
Instant access to the full article PDF.
Tax calculation will be finalised during checkout.
Lee A, Ko H, Cho D I D, et al. Non-ideal behavior of a driving resonator loop in a vibratory capacitive microgyroscope. Microelectronics J, 2008, 39: 1–6
Acar C, Shkel A M. An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes. J Microelectromech Syst, 2005, 14: 520–528
Alper S E, Akin T. A symmetric surface micro-machined gyroscope with decoupled oscillation modes. Sensors Actuat A Phys, 2002, 97–98: 347–358
Weinberg M S, Kourepenis A. Error sources in in-plane silicon tuning-fork MEMS gyroscopes. J Microelectromech Syst, 2006, 15: 479–491
Saukoski M, Aaltonen L, Halonen K A I, et al. Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes. IEEE Sensors J, 2007, 7: 1639–1652
Guo Z Y, Liu X S, Yang Z C, et al. Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope. In: Proceedings of IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS), Hong Kong, 2010. 264–267
Cagdaser B, Jog A, Last M, et al. Capacitive sense feedback control for MEMS beam steering mirrors. In: Proceedings of Solid-State Sensor and Actuator Workshop, Hilton Head Island, 2004. 348–351
Acar C, Shkel A M. Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement. J Micromech Microeng, 2005, 15: 1092–1101
Cui J, Guo Z Y, Yang Z C, et al. Electrical coupling suppressing for a microgyroscope using ascending frequency drive with 2-DOF PID controller. In: Proceedings of the 16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), Beijing, 2011. 2002–2005
Cui J, Guo Z Y, Yang Z C, et al. Electrical coupling suppression and transient response improvement for a microgyroscope using ascending frequency drive with a 2-DOF PID controller. J Micromech Microeng, 2011, 21: 095020
Trusov A A, Prikhodko I P, Rozelle D M, et al. 1 PPM precision self calibration of scale factor in MEMS Coriolis vibratory gyroscopes. In: Proceedings of Transducers & Eurosensors XXVII: the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), Barcelona, 2013. 2531–2534
Woo J K, Cho J Y, Boyd C, et al. Whole-angle-mode micromachined fused-silica birdbath resonator gyroscope (WABRG). In: Proceedings of the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), San Francisco, 2014. 20–23
Senkal D, Ng E J, Hong V, et al. Parametric drive of a toroidal MEMS rate integrating gyroscope demonstrating <20 ppm scale factor stability. In: Proceedings of the 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015. 29–32
Xiao Q J, Li S Y, Chen W Y, et al. Fuzzy tuning PI control for initial levitation of micromachined electrostatically levitated gyroscope. Electron Lett, 2009, 45: 818–819
Fei J T, Xin M Y. An adaptive fuzzy sliding mode controller for MEMS triaxial gyroscope with angular velocity estimation. Nonlinear Dyn, 2012, 70: 97–109
He C H, Zhao Q C, Huang Q W, et al. A MEMS vibratory gyroscope with real-time mode-matching and robust control for the sense mode. IEEE Sensors J, 2015, 15: 2069–2077
Ding H T, Yang Z C, Zhang M L, et al. Experimental study on the footing effect for SOG structures using DRIE. J Semicond, 2008, 29: 1088–1093
Ding H T, Liu X S, Lin L T, et al. A High-resolution silicon-on-glass axis gyroscope operating at atmospheric pressure. IEEE Sensors J, 2010, 10: 1066–1074
Liu Y X, He C H, Liu D C, et al. Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm. In: Proceedings of the 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Suzhou, 2013. 1145–1148
Liu D C, He C H, Zhao Q C, et al. Digital signal processing for a micromachined vibratory gyroscope based on a three dimensional adaptive filter demodulator. Measurement, 2014, 50: 198–202
Li Z P, Fan Q J, Chang L M, et al. Improved wavelet threshold denoising method for MEMS gyroscope. In: Proceedings of the 11th IEEE International Conference on Control & Automation (ICCA), Taichung, 2014. 530–534
Stebler Y, Guerrier S, Skaloud J, et al. Generalized method of wavelet moments for inertial navigation filter design. IEEE Trans Aerospace Electron Syst, 2014, 50: 2269–2283
This work was partially supported by National Natural Science Foundation of China (Grant Nos. 61434003, 51505089).
About this article
Cite this article
He, C., Zhang, J., Zhao, Q. et al. An electrical-coupling-suppressing MEMS gyroscope with feed-forward coupling compensation and scalable fuzzy control. Sci. China Inf. Sci. 60, 042402 (2017). https://doi.org/10.1007/s11432-015-0931-8
- MEMS gyroscope
- electrical coupling suppressing
- feed-forward coupling compensation
- scalable fuzzy control