Skip to main content
SpringerLink
Log in

High-density stacked microcoils integrated microminiaturized electromagnetic vibration energy harvester for self-powered acceleration sensing

  • Article
  • Published:
Science China Technological Sciences Aims and scope Submit manuscript

Abstract

With the rapid development of microelectronics and flexible electronics technology, self-powered sensors have significant application prospects in human-machine interface systems and Internet of Things. However, piezoelectric- and triboelectric-based sensors have low current output and are easily affected, while electromagnetic-based sensors are difficult to miniaturize. This work proposes a high-density stacked microcoil integrated microminiaturized electromagnetic vibration energy harvester (EVEH). The double-layer high-density microcoil is fabricated on both sides of the flexible polyimide substrate interconnected via the central through-hole. Owing to reduced single coil line width, line spacing, and stacked structure, the number of turns can be substantially enhanced. Moreover, the relative position of the coils and magnet has a considerable influence on the performances; due to the huge change rate in magnetic flux when the coil is placed in the radial direction of the magnet than in the axial direction, the open-circuit voltage in the radial direction is 10 times greater. The microcoil can maintain good performance at high, low temperatures and under bending conditions. When the distance between the ends of the coil changes from 2 to 20 mm in 2 mm steps, the bending angle of the coil changes from 45° to 270° in 45° steps; furthermore, when the coil is exposed to −40 and 60°C conditions, the coil resistance is maintained at approximately 447 Ω. The peak open-circuit voltage of three-piece microcoils reaches 0.41 V at 4 Hz under 2g, and the output voltage and current increase with an increasing number of stacked layers. These excellent properties indicate that EVEH can be used for self-powered acceleration sensing. The sensitivity is measured to be 0.016 V/(m/s2) with a correlation coefficient of 0.979 over the acceleration range of 1–18 m/s2. Thus, the developed microminiaturized EVEH has enormous potential for self-powered sensing applications in confined spaces and harsh environments.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. Zheng S, Wang H, Das P, et al. Multitasking MXene inks enable high-performance printable microelectrochemical energy storage devices for all-flexible self-powered integrated systems. Adv Mater, 2021, 33: 2005449

    Article  Google Scholar 

  2. Kim E, Song J, Song T E, et al. Scalable fabrication of MXene-based flexible micro-supercapacitor with outstanding volumetric capacitance. Chem Eng J, 2022, 450: 138456

    Article  Google Scholar 

  3. Sun N, Wen Z, Zhao F, et al. All flexible electrospun papers based self-charging power system. Nano Energy, 2017, 38: 210–217

    Article  Google Scholar 

  4. Yang C, He J, Guo Y, et al. Highly conductive liquid metal electrode based stretchable piezoelectric-enhanced triboelectric nanogenerator for harvesting irregular mechanical energy. Mater Des, 2021, 201: 109508

    Article  Google Scholar 

  5. Jiao P, Hasni H, Lajnef N, et al. Mechanical metamaterial piezoelectric nanogenerator (MM-PENG): Design principle, modeling and performance. Mater Des, 2020, 187: 108214

    Article  Google Scholar 

  6. Zhao C, Wu Y, Dai X, et al. Calliopsis structure-based triboelectric nanogenerator for harvesting wind energy and self-powerd wind speed/direction sensor. Mater Des, 2022, 221: 111005

    Article  Google Scholar 

  7. Ponnamma D, Parangusan H, Tanvir A, et al. Smart and robust electrospun fabrics of piezoelectric polymer nanocomposite for self-powering electronic textiles. Mater Des, 2019, 184: 108176

    Article  Google Scholar 

  8. He J, Wen T, Qian S, et al. Triboelectric-piezoelectric-electromagnetic hybrid nanogenerator for high-efficient vibration energy harvesting and self-powered wireless monitoring system. Nano Energy, 2018, 43: 326–339

    Article  Google Scholar 

  9. Fang L, Zheng Q, Hou W, et al. A self-powered vibration sensor based on the coupling of triboelectric nanogenerator and electromagnetic generator. Nano Energy, 2022, 97: 107164

    Article  Google Scholar 

  10. Zhang Z, Gu Y, Wang S, et al. Dynamic modeling and experimental validation of a low frequency piezoelectric vibration energy harvester via secondary excitation of pressured fluid. Mech Syst Signal Processing, 2023, 191: 110170

    Article  Google Scholar 

  11. Xie Z, Liu L, Huang W, et al. A multimodal E-shaped piezoelectric energy harvester with a built-in bistability and internal resonance. Energy Convers Manage, 2023, 278: 116717

    Article  Google Scholar 

  12. Liao B, Zhao R, Yu K, et al. Theoretical and experimental investigation of a bi-stable piezoelectric energy harvester incorporating fluid-induced vibration. Energy Convers Manage, 2022, 255: 115307

    Article  Google Scholar 

  13. Yu H, Xi Z, Zhang Y, et al. High performance additional mass enhanced film structure triboelectric nanogenerator for scavenging vibration energy in broadband frequency range. Nano Energy, 2023, 107: 108182

    Article  Google Scholar 

  14. Qi Y, Kuang Y, Liu Y, et al. Kirigami-inspired triboelectric nano-generator as ultra-wide-band vibrational energy harvester and self-powered acceleration sensor. Appl Energy, 2022, 327: 120092

    Article  Google Scholar 

  15. Varghese H, Hakkeem H M A, Chauhan K, et al. A high-performance flexible triboelectric nanogenerator based on cellulose acetate nano-fibers and micropatterned PDMS films as mechanical energy harvester and self-powered vibrational sensor. Nano Energy, 2022, 98: 107339

    Article  Google Scholar 

  16. Hasani M, Irani Rahaghi M. The optimization of an electromagnetic vibration energy harvester based on developed electromagnetic damping models. Energy Convers Manage, 2022, 254: 115271

    Article  Google Scholar 

  17. Imbaquingo C, Bahl C, Insinga A R, et al. A two-dimensional electromagnetic vibration energy harvester with variable stiffness. Appl Energy, 2022, 325: 119650

    Article  Google Scholar 

  18. Wang Y, Wang P, Li S, et al. An electromagnetic vibration energy harvester using a magnet-array-based vibration-to-rotation conversion mechanism. Energy Convers Manage, 2022, 253: 115146

    Article  Google Scholar 

  19. Liu Z, Li H, Shi B, et al. Wearable and implantable triboelectric nanogenerators. Adv Funct Mater, 2019, 29: 1808820

    Article  Google Scholar 

  20. Zhang Q, Wang Y, Kim E S. Electromagnetic energy harvester with flexible coils and magnetic spring for 1–10 Hz resonance. J Microelectromech Syst, 2015, 24: 1193–1206

    Article  Google Scholar 

  21. Wang Y, Zhang Q, Zhao L, et al. Vibration energy harvester with low resonant frequency based on flexible coil and liquid spring. Appl Phys Lett, 2016, 109: 203901

    Article  Google Scholar 

  22. Li Y, Zhang W, Zhang Y, et al. A batch-fabricated electromagnetic energy harvester based on flex-rigid structures. Sens Actuat A-Phys, 2017, 263: 571–579

    Article  Google Scholar 

  23. Li Y, Li J, Yang A, et al. Electromagnetic vibrational energy harvester with microfabricated springs and flexible coils. IEEE Trans Ind Electron, 2021, 68: 2684–2693

    Article  Google Scholar 

  24. Sun D, Chen M, Podilchak S, et al. Investigating flexible textile-based coils for wireless charging wearable electronics. J Industrial Textiles, 2020, 50: 333–345

    Article  Google Scholar 

  25. Grabham N J, Li Y, Clare L R, et al. Fabrication techniques for manufacturing flexible coils on textiles for inductive power transfer. IEEE Sens J, 2018, 18: 2599–2606

    Article  Google Scholar 

  26. Shahariar H, Kim I, Soewardiman H, et al. Inkjet printing of reactive silver ink on textiles. ACS Appl Mater Interfaces, 2019, 11: 6208–6216

    Article  Google Scholar 

  27. Zhang Q, Kim E S. Microfabricated electromagnetic energy harvesters with magnet and coil arrays suspended by silicon springs. IEEE Sens J, 2015, 16: 634–641

    Article  Google Scholar 

  28. Han D, Shinshi T, Kine M. Energy scavenging from low frequency vibrations through a multi-pole thin magnet and a high-aspect-ratio array coil. Int J Precis Eng Manuf-Green Tech, 2021, 8: 139–150

    Article  Google Scholar 

  29. Khan F U. A vibration-based electromagnetic and piezoelectric hybrid energy harvester. Int J Energy Res, 2020, 44: 6894–6916

    Article  Google Scholar 

  30. Wang X, Li J, Zhou C, et al. Torsional electromagnetic vibrational energy harvester based on stacked flexible coils. In: IECON 2021–47th Annual Conference of the IEEE Industrial Electronics Society. Toronto: IEEE, 2021. 1–5

    Google Scholar 

  31. Wang X, Li J, Zhou C, et al. Vibration energy harvester based on torsionally oscillating magnet. Micromachines, 2021, 12: 1545

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan, 030051, China

    XiaoJuan Hou, RuoYang Zhang, XiaoXue Bi, Jie Zhang, WenPing Geng, Jian He & XiuJian Chou

  2. School of Chemistry and Chemical Engineering, North University of China, Taiyuan, 030051, China

    HuiPeng Zhao

  3. School of Computer Science and Engineering, North China Institute of Aerospace Engineering, Langfang, 065000, China

    Jie Zhu

Authors
  1. XiaoJuan Hou
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. RuoYang Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. XiaoXue Bi
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. HuiPeng Zhao
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Jie Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Jie Zhu
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. WenPing Geng
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Jian He
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. XiuJian Chou
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding authors

Correspondence to XiaoJuan Hou or Jian He.

Additional information

This work was supported in part by the National Key Research and Development Program of China (Grant No. 2019YFE0120300), the National Natural Science Foundation of China (Grant Nos. 52175554, 62171414, and 52205608), the Fundamental Research Program of Shanxi Province (Grant No. 202103021223201), and the Young Top Talent Project of Hebei Provincial Department of Education (Grant No. BJK2023116).

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Hou, X., Zhang, R., Bi, X. et al. High-density stacked microcoils integrated microminiaturized electromagnetic vibration energy harvester for self-powered acceleration sensing. Sci. China Technol. Sci. 66, 3369–3380 (2023). https://doi.org/10.1007/s11431-023-2507-6

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11431-023-2507-6

Search

Navigation