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Oxidating liquid metal interface integrated capacitive pressure detection

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Abstract

The characteristics of real-time monitoring and flexible integration based on passive capacitive detection are becoming the preferred sensing strategy for wearable devices. However, the currently designed capacitive sensors mostly focused on the bionic microstructures to improve sensitivity and measurement accuracy, while ignoring the inherent mechanical wear and resistance of multilayer structures. In this paper, an integrated monolithic capacitive pressure detection based on room temperature liquid metal is designed and fabricated, avoiding the tightness problem of the multi-layer structure. The oxidized paste-like liquid metal owning superior interfacial wetting properties can stably adhere to the surface of the porous framework. The gas-filled porous framework endows the capacitive sensor with a mechanical response of 0.0557 g with a response and recovery time of 1.26 and 0.63 s under a load condition of 150 Pa, and steadily maintained in 1600 cycle tests. Finally, the capacitive sensor is employed to detect human physiological signals and force shock responses, which could clearly distinguish different action signals, providing a new platform for the subsequent development and design of integrated capacitive sensors.

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Authors and Affiliations

  1. College of Water Conservancy and Hydropower Engineering, Sichuan Agricultural University, Ya’an, 625014, China

    Jun-Heng Fu, Teng Zhang, Yun Zeng, MingLei Yan, Wei Tang & Yang Zhao

  2. School of Electrical and Electronic Engineering, Shijiazhuang Tiedao University, Shijiazhuang, 050043, China

    Fei Zhan

  3. Beijing Key Laboratory of Cryo-Biomedical Engineering, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, 100190, China

    ZeRong Xing, Jing Liu & Lei Wang

  4. Department of Materials Science and Engineering, The University of Sheffield, Sheffield, S1 3JD, UK

    XinLong Sun

  5. School of Future Technology, University of Chinese Academy of Sciences, Beijing, 100049, China

    ZeRong Xing & Jing Liu

  6. Department of Biomedical Engineering, School of Medicine, Tsinghua University, Beijing, 100084, China

    Jing Liu

Authors
  1. Jun-Heng Fu
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  2. Fei Zhan
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  3. ZeRong Xing
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  4. Teng Zhang
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  5. XinLong Sun
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  6. Yun Zeng
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  8. Wei Tang
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  9. Jing Liu
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  10. Lei Wang
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  11. Yang Zhao
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Corresponding authors

Correspondence to Lei Wang or Yang Zhao.

Additional information

This work was supported by the National Natural Science Foundation of China (Grant No. 21805294).

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Fu, JH., Zhan, F., Xing, Z. et al. Oxidating liquid metal interface integrated capacitive pressure detection. Sci. China Technol. Sci. 66, 1629–1639 (2023). https://doi.org/10.1007/s11431-022-2357-x

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  • DOI: https://doi.org/10.1007/s11431-022-2357-x

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