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Femtosecond laser-induced periodic surface structures on hard and brittle materials

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Abstract

Hard and brittle materials have high hardness, excellent optical stability, chemical stability, and high thermal stability. Hence, they have huge application potential in various fields, such as optical components, substrate materials, and quantum information, especially under harsh conditions, such as high temperatures and high pressures. Femtosecond laser direct writing technology has greatly promoted the development of femtosecond laser-induced periodic surface structure (Fs-LIPSS or LIPSS by a femtosecond laser) applications of hard and brittle materials due to its high precision, controllability, and three-dimensional processing ability. Thus far, LIPSSs have been widely used in material surface treatment, optoelectronic devices, and micro-mechanics. However, a consensus has not been reached regarding the formation mechanism of LIPSSs on hard and brittle materials. In this paper, three widely accepted LIPSS formation mechanisms are introduced, and the characteristics and applications of LIPSSs on diamonds, silicon, silicon carbide, and fused silica surfaces in recent years are summarized. In addition, the application prospects and challenges of LIPSSs on hard and brittle materials by a femtosecond laser are discussed.

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Authors and Affiliations

  1. Center for Advanced Laser Technology, Hebei University of Technology, Tianjin, 300401, China

    GuoXu Zhao, Gong Wang, YunFei Li, YuDong Lian, Yu Yu, YuLei Wang & ZhiWei Lu

  2. Hebei Key Laboratory of Advanced Laser Technology and Equipment, Tianjin, 300401, China

    GuoXu Zhao, Gong Wang, YunFei Li, YuDong Lian, Yu Yu, YuLei Wang & ZhiWei Lu

  3. State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, 130012, China

    Lei Wang

  4. School of Information and Electrical Engineering, Hebei University of Engineering, Handan, 056038, China

    Hui Zhao

Authors
  1. GuoXu Zhao
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  2. Gong Wang
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  3. YunFei Li
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  4. Lei Wang
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  5. YuDong Lian
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  6. Yu Yu
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  7. Hui Zhao
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  8. YuLei Wang
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  9. ZhiWei Lu
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Corresponding authors

Correspondence to Gong Wang, YunFei Li or Hui Zhao.

Additional information

This work was supported by the National Natural Science Foundation of China (Grant No. 62004059), the Natural Science Research Foundation of Hebei University of Technology (Grant No. BKYXX2203), the Natural Science Foundation of Hebei Province (Grant Nos. F2021202047 and F2021202002), the Funding Projects for the Introduction of Overseas Staff of Hebei Province (Grant No. C20210334), and the Key Laboratory Fund Project (Grant No. 2021JCJQLB055004).

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Zhao, G., Wang, G., Li, Y. et al. Femtosecond laser-induced periodic surface structures on hard and brittle materials. Sci. China Technol. Sci. 67, 19–36 (2024). https://doi.org/10.1007/s11431-022-2327-8

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  • DOI: https://doi.org/10.1007/s11431-022-2327-8

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