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Highly sensitive piezoresistive pressure sensors based on laser-induced graphene with molybdenum disulfide nanoparticles

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Abstract

Wearable pressure sensors have drawn significant attention because of their extensive applications in motion detection, tactile sensing, and health monitoring. However, the complex manufacturing process and high cost of active materials make low-cost, large-scale production elusive. In this work, we report a flexible piezoresistive pressure sensor assembled with two 3D laser-induced graphene (LIG) foam electrodes on a polyimide thin film from a simple laser scribing process in the ambient environment. The design of the air gap between the two foam electrodes allows the sensor to showcase a low limit of detection of 0.274 Pa, which provides favorable sensing performance in motion detection and wrist pulse monitoring. The addition of spherical MoS2 nanoparticles between the two foam electrodes further enhances the sensitivity to 88 kPa−1 and increases the sensing range to significantly outperform the previous literature reports. The demonstrated LIG pressure sensors also exhibit fast response/recovery rates and excellent durability/repeatability.

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References

  1. Trung T Q, Dang T M L, Ramasundaram S, et al. A stretchable strain-insensitive temperature sensor based on free-standing elastomeric composite fibers for on-body monitoring of skin temperature. ACS Appl Mater Interfaces, 2019, 11: 2317–2327

    Article  Google Scholar 

  2. Yin B, Liu X, Gao H, et al. Bioinspired and bristled microparticles for ultrasensitive pressure and strain sensors. Nat Commun, 2018, 9: 5161

    Article  Google Scholar 

  3. Zhao Y, Zhai Q, Dong D, et al. Highly stretchable and strain-insensitive fiber-based wearable electrochemical biosensor to monitor glucose in the sweat. Anal Chem, 2019, 91: 6569–6576

    Article  Google Scholar 

  4. Tao L Q, Zhang K N, Tian H, et al. Graphene-paper pressure sensor for detecting human motions. ACS Nano, 2017, 11: 8790–8795

    Article  Google Scholar 

  5. Miao P, Wang J, Zhang C, et al. Graphene nanostructure-based tactile sensors for electronic skin applications. Nano-Micro Lett, 2019, 11: 1–37

    Article  Google Scholar 

  6. Jeon G J, Yeom H I, Jin T, et al. A highly sensitive, stable, scalable pressure sensor based on a facile baking-inspired foaming process for a human-computer interface. J Mater Chem C, 2020, 8: 4271–4278

    Article  Google Scholar 

  7. Lou Z, Chen S, Wang L, et al. An ultra-sensitive and rapid response speed graphene pressure sensors for electronic skin and health monitoring. Nano Energy, 2016, 23: 7–14

    Article  Google Scholar 

  8. Han Z, Cheng Z, Chen Y, et al. Fabrication of highly pressure-sensitive, hydrophobic, and flexible 3D carbon nanofiber networks by electrospinning for human physiological signal monitoring. Nanoscale, 2019, 11: 5942–5950

    Article  Google Scholar 

  9. Zhu B, Ling Y, Yap L W, et al. Hierarchically structured vertical gold nanowire array-based wearable pressure sensors for wireless health monitoring. ACS Appl Mater Interfaces, 2019, 11: 29014–29021

    Article  Google Scholar 

  10. Kim S, Amjadi M, Lee T I, et al. Wearable, ultrawide-range, and bending-insensitive pressure sensor based on carbon nanotube network-coated porous elastomer sponges for human interface and healthcare devices. ACS Appl Mater Interfaces, 2019, 11: 23639–23648

    Article  Google Scholar 

  11. Yu G H, Hu J D, Tan J P, et al. A wearable pressure sensor based on ultra-violet/ozone microstructured carbon nanotube/polydimethylsiloxane arrays for electronic skins. Nanotechnology, 2018, 29: 115502

    Article  Google Scholar 

  12. Pang Y, Zhang K, Yang Z, et al. Epidermis microstructure inspired graphene pressure sensor with random distributed spinosum for high sensitivity and large linearity. ACS Nano, 2018, 12: 2346–2354

    Article  Google Scholar 

  13. Han Z, Li H, Xiao J, et al. Ultralow-cost, highly sensitive, and flexible pressure sensors based on carbon black and airlaid paper for wearable electronics. ACS Appl Mater Interfaces, 2019, 11: 33370–33379

    Article  Google Scholar 

  14. Yang J, Luo S, Zhou X, et al. Flexible, tunable, and ultrasensitive capacitive pressure sensor with microconformal graphene electrodes. ACS Appl Mater Interfaces, 2019, 11: 14997–15006

    Article  Google Scholar 

  15. Yang Y, Pan H, Xie G, et al. Flexible piezoelectric pressure sensor based on polydopamine-modified BaTiO3/PVDF composite film for human motion monitoring. Sens Actuat A-Phys, 2020, 301: 111789

    Article  Google Scholar 

  16. Das P S, Chhetry A, Maharjan P, et al. A laser ablated graphene-based flexible self-powered pressure sensor for human gestures and finger pulse monitoring. Nano Res, 2019, 12: 1789–1795

    Article  Google Scholar 

  17. Park S J, Kim J, Chu M, et al. Flexible piezoresistive pressure sensor using wrinkled carbon nanotube thin films for human physiological signals. Adv Mater Technol, 2018, 3: 1700158

    Article  Google Scholar 

  18. Ruth S R A, Feig V R, Tran H, et al. Microengineering pressure sensor active layers for improved performance. Adv Funct Mater, 2020, 30: 2003491

    Article  Google Scholar 

  19. Huang Z, Gao M, Yan Z, et al. Pyramid microstructure with single walled carbon nanotubes for flexible and transparent micro-pressure sensor with ultra-high sensitivity. Sens Actuat A-Phys, 2017, 266: 345–351

    Article  Google Scholar 

  20. Li H, Wu K, Xu Z, et al. Ultrahigh-sensitivity piezoresistive pressure sensors for detection of tiny pressure. ACS Appl Mater Interfaces, 2018, 10: 20826–20834

    Article  Google Scholar 

  21. Peng S, Blanloeuil P, Wu S, et al. Rational design of ultrasensitive pressure sensors by tailoring microscopic features. Adv Mater Interfaces, 2018, 5: 1800403

    Article  Google Scholar 

  22. Li G, Chen D, Li C, et al. Engineered microstructure derived hierarchical deformation of flexible pressure sensor induces a supersensitive piezoresistive property in broad pressure range. Adv Sci, 2020, 7: 2000154

    Article  Google Scholar 

  23. Cheng L, Qian W, Wei L, et al. A highly sensitive piezoresistive sensor with interlocked graphene microarrays for meticulous monitoring of human motions. J Mater Chem C, 2020, 8: 11525–11531

    Article  Google Scholar 

  24. Liu W, Liu N, Yue Y, et al. Piezoresistive pressure sensor based on synergistical innerconnect polyvinyl alcohol nanowires/wrinkled graphene film. Small, 2018, 14: 1704149

    Article  Google Scholar 

  25. Yang J C, Kim J O, Oh J, et al. Microstructured porous pyramid-based ultrahigh sensitive pressure sensor insensitive to strain and temperature. ACS Appl Mater Interfaces, 2019, 11: 19472–19480

    Article  Google Scholar 

  26. Xu X, Wang R, Nie P et al. Copper nanowire-based aerogel with tunable pore structure and its application as flexible pressure sensor. ACS Appl Mater Interfaces, 2017, 9: 14273–14280

    Article  Google Scholar 

  27. Lee D, Lee H, Jeong Y, et al. Highly sensitive, transparent, and durable pressure sensors based on sea-urchin shaped metal nanoparticles. Adv Mater, 2016, 28: 9364–9369

    Article  Google Scholar 

  28. Lin J, Peng Z W, Liu Y Y, et al. Laser-induced porous graphene films from commercial polymers. Nat Commun, 2014, 5: 5714

    Article  Google Scholar 

  29. Ye R, James D K, Tour J M. Laser-induced graphene: From discovery to translation. Adv Mater, 2019, 31: 1803621

    Article  Google Scholar 

  30. Zhang C, Peng Z, Huang C, et al. High-energy all-in-one stretchable micro-supercapacitor arrays based on 3D laser-induced graphene foams decorate with mesoporous ZnP nanosheets for self-powered stretchable systems. Nano Energy, 2021, 81: 105609

    Article  Google Scholar 

  31. Yang L, Yi N, Zhu J, et al. Novel gas sensing platform based on a stretchable laser-induced graphene pattern with self-heating capabilities. J Mater Chem A, 2020, 8: 6487–6500

    Article  Google Scholar 

  32. Zhu J, Hu Z, Song C, et al. Stretchable wideband dipole antennas and rectennas for RF energy harvesting. Mater Today Phys, 2021, 18: 100377

    Article  Google Scholar 

  33. Wakabayashi S, Arie T, Akita S, et al. Very thin, macroscale, flexible, tactile pressure sensor sheet. ACS Omega, 2020, 5: 17721–17725

    Article  Google Scholar 

  34. Tian Q, Yan W, Li Y, et al. Bean pod-inspired ultrasensitive and self-healing pressure sensor based on laser-induced graphene and polystyrene microsphere sandwiched structure. ACS Appl Mater Interfaces, 2020, 12: 9710–9717

    Article  Google Scholar 

  35. Tian H, Shu Y, Wang X F, et al. A graphene-based resistive pressure sensor with record-high sensitivity in a wide pressure range. Sci Rep, 2015, 5: 8603

    Article  Google Scholar 

  36. Zhu Y, Li J, Cai H, et al. Highly sensitive and skin-like pressure sensor based on asymmetric double-layered structures of reduced graphite oxide. Sens Actuat B-Chem, 2018, 255: 1262–1267

    Article  Google Scholar 

  37. Zhu Y S, Cai H B, Ding H Y, et al. Fabrication of low-cost and highly sensitive graphene-based pressure sensors by direct laser scribing polydimethylsiloxane. ACS Appl Mater Interfaces, 2019, 11: 6195–6200

    Article  Google Scholar 

  38. Luo Y, Shao J, Chen S, et al. Flexible capacitive pressure sensor enhanced by tilted micropillar arrays. ACS Appl Mater Interfaces, 2019, 11: 17796–17803

    Article  Google Scholar 

  39. Han S, Liu C, Huang Z, et al. High-performance pressure sensors based on 3d microstructure fabricated by a facile transfer technology. Adv Mater Technol, 2019, 4: 1800640

    Article  Google Scholar 

  40. Yi N, Cheng Z, Li H, et al. Stretchable, ultrasensitive, and low-temperature NO2 sensors based on MoS2@rGO nanocomposites. Mater Today Phys, 2020, 15: 100265

    Article  Google Scholar 

  41. Huang C B, Witomska S, Aliprandi A, et al. Molecule-graphene hybrid materials with tunable mechanoresponse: Highly sensitive pressure sensors for health monitoring. Adv Mater, 2019, 31: 1804600

    Article  Google Scholar 

  42. Guo S Z, Qiu K, Meng F, et al. 3D printed stretchable tactile sensors. Adv Mater, 2017, 29: 1701218

    Article  Google Scholar 

  43. Yang J, Ye Y, Li X, et al. Flexible, conductive, and highly pressure-sensitive graphene-polyimide foam for pressure sensor application. Compos Sci Tech, 2018, 164: 187–194

    Article  Google Scholar 

  44. Chen Z, Wang Z, Li X, et al. Flexible piezoelectric-induced pressure sensors for static measurements based on nanowires/graphene heterostructures. ACS Nano, 2017, 11: 4507–4513

    Article  Google Scholar 

  45. Munir S, Jiang B, Guilcher A, et al. Exercise reduces arterial pressure augmentation through vasodilation of muscular arteries in humans. Am J Physiol-Heart Circulatory Physiol, 2008, 294: H1645–H1650

    Article  Google Scholar 

  46. Chen C H, Ting C T, Nussbacher A, et al. Validation of carotid artery tonometry as a means of estimating augmentation index of ascending aortic pressure. Hypertension, 1996, 27: 168–175

    Article  Google Scholar 

  47. Joo Y, Byun J, Seong N, et al. Silver nanowire-embedded PDMS with a multiscale structure for a highly sensitive and robust flexible pressure sensor. Nanoscale, 2015, 7: 6208–6215

    Article  Google Scholar 

  48. Shuai X, Zhu P, Zeng W, et al. Highly sensitive flexible pressure sensor based on silver nanowires-embedded polydimethylsiloxane electrode with microarray structure. ACS Appl Mater Interfaces, 2017, 9: 26314–26324

    Article  Google Scholar 

  49. Yin F, Yang J, Peng H, et al. Flexible and highly sensitive artificial electronic skin based on graphene/polyamide interlocking fabric. J Mater Chem C, 2018, 6: 6840–6846

    Article  Google Scholar 

  50. Chen W, Gui X, Liang B, et al. Structural engineering for high sensitivity, ultrathin pressure sensors based on wrinkled graphene and anodic aluminum oxide membrane. ACS Appl Mater Interfaces, 2017, 9: 24111–24117

    Article  Google Scholar 

  51. Ma L, Shuai X, Hu Y, et al. A highly sensitive and flexible capacitive pressure sensor based on a micro-arrayed polydimethylsiloxane dielectric layer. J Mater Chem C, 2018, 6: 13232–13240

    Article  Google Scholar 

  52. Xiong Y, Shen Y, Tian L, et al. A flexible, ultra-highly sensitive and stable capacitive pressure sensor with convex microarrays for motion and health monitoring. Nano Energy, 2020, 70: 104436

    Article  Google Scholar 

  53. Jian M, Xia K, Wang Q, et al. Flexible and highly sensitive pressure sensors based on bionic hierarchical structures. Adv Funct Mater, 2017, 27: 1606066

    Article  Google Scholar 

  54. Liu Y, Tao L Q, Wang D Y, et al. Flexible, highly sensitive pressure sensor with a wide range based on graphene-silk network structure. Appl Phys Lett, 2017, 110: 123508

    Article  Google Scholar 

  55. He Z, Chen W, Liang B, et al. Capacitive pressure sensor with high sensitivity and fast response to dynamic interaction based on graphene and porous nylon networks. ACS Appl Mater Interfaces, 2018, 10: 12816–12823

    Article  Google Scholar 

  56. Shi J, Wang L, Dai Z, et al. Multiscale hierarchical design of a flexible piezoresistive pressure sensor with high sensitivity and wide linearity range. Small, 2018, 14: e1800819

    Article  Google Scholar 

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Author notes

  1. These authors contributed equally to this work.

Authors and Affiliations

  1. School of Science, Xi’an Aeronautical University, Xi’an, 710077, China

    DaPeng Hao

  2. Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, State College, PA, 16802, USA

    DaPeng Hao, RuoXi Yang & HuanYu Cheng

  3. School of Mechanical Engineering, Hebei University of Technology, Tianjin, 300401, China

    RuoXi Yang

  4. Department of Materials Science and Engineering, The Pennsylvania State University, University Park, State College, PA, 16802, USA

    Ning Yi & HuanYu Cheng

Authors
  1. DaPeng Hao
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  2. RuoXi Yang
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  3. Ning Yi
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  4. HuanYu Cheng
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Corresponding author

Correspondence to HuanYu Cheng.

Additional information

YANG RuoXi acknowledges the support from the Joint Doctoral Training Foundation of HEBUT. CHENG HuanYu would like to acknowledge the supports from the National Natural Science Foundation of China (Grant No. ECCS-1933072), the National Heart, Lung, and Blood Institute of the National Institutes of Health (Grant No. R61HL154215), and the Penn State University (Center for Security Research and Education, Center for Biodevices, and College of Engineering Multidisciplinary Seed Grants).

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11431_2021_1899_MOESM1_ESM.pdf

Highly sensitive piezoresistive pressure sensors based on laser-induced graphene with molybdenum disulfide nanoparticles

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Hao, D., Yang, R., Yi, N. et al. Highly sensitive piezoresistive pressure sensors based on laser-induced graphene with molybdenum disulfide nanoparticles. Sci. China Technol. Sci. 64, 2408–2414 (2021). https://doi.org/10.1007/s11431-021-1899-9

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  • DOI: https://doi.org/10.1007/s11431-021-1899-9

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