Science China Technological Sciences

, Volume 61, Issue 2, pp 250–256 | Cite as

Investigation of the influence of ultrasonic stirring on mass transfer in the through-mask electrochemical micromachining process



Surface texturing is a widely accepted approach for friction reduction between mechanical components. Through-mask electrochemical micromachining is a simple and reliable process for metal surface texturing in which mass transport conditions have profound influence on final machined quality. An ultrasonic stirrer is usually adopted for mass transfer enhancement. However, understanding of the effects of ultrasonic stirring on mass transfer is limited, and is far from sufficient for developing guidelines for its practical application. In this work, the influences of ultrasonic stirring parameters on mass transfer have been investigated numerically and experimentally. With the numerical method, periodic pressure change in the electrolyte over time has been obtained, showing that ultrasonic stirring results in drastic transient pressure change in electrolyte fluid fields. Parameters related to ultrasonic frequency, vibration amplitude, and the depth of anode surface immersed in the electrolyte solution influence pressure amplitude. Validation experiments have been conducted and etched surface profile and morphology characterized, which show that the experimental observations are in agreement with numerical predictions. With the optimized mass transfer, well-defined micro-pits array of 30 μm and a smooth etched surface on tin-bronze substrate in large scale have been demonstrated.


surface texture through-mask electrochemical micromachining mass transfer ultrasonic stirring numerical simulation 


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Copyright information

© Science China Press and Springer-Verlag GmbH Germany, part of Springer Nature 2017

Authors and Affiliations

  1. 1.School of Mechanical and Precision Instrument EngineeringXi’an University of TechnologyXi’anChina
  2. 2.State Key Laboratory for Manufacturing Systems EngineeringXi’an Jiaotong UniversityXi’anChina

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