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Fabrication of YBCO superconducting microarray by sol-gel process using photosensitive metal chelates

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Abstract

We used yttrium acetate, barium acetate, and copper acetate as the starting materials, benzalacetone (BzAcH) as chemical modifier, and methanol (MEOH) as solvent to synthesize a stable fluorine-free YBCO precursor sol. The coated YBCO gel film using this precursor sol exhibited photosensitivity to UV irradiation at a wavelength of 330 nm. After the subsequent exposing, the YBCO gel film showed a decreased solubility in several organic solvents. Based on the photosensitivity of the YBCO/BzAcH gel film, YBCO superconducting microarray with the pitch of 5 μm was fabricated by irradiating the gel film with UV light through a mask, followed by leaching the unirradiated area in a mixture solvent of methanol and n-butyl alcohol with the volume ratio of 1:1. After proper heat treatment the x-ray diffraction result showed that the as-prepared arrays were highly c-axis oriented and with a high T c by this new photosensitive sol-gel process.

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Correspondence to GaoYang Zhao.

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Zhao, G., Jia, J., Jiang, F. et al. Fabrication of YBCO superconducting microarray by sol-gel process using photosensitive metal chelates. Sci. China Technol. Sci. 56, 1409–1414 (2013). https://doi.org/10.1007/s11431-013-5219-0

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  • DOI: https://doi.org/10.1007/s11431-013-5219-0

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