Abstract
Thermo-optic tunable thin-film filter based on Fabry-Perot (F-P) cavity structure is a very attractive alternative integrated optical device. In this simulation-based paper, the key performance of typical thermo-optic tunable F-P filter is discussed by analyzing the structure of Distributed Bragger Reflectors (DBR) and the thermo-optic property of cavity thin-film material. The results indicate a negative correlation between the number of DBR periodical layers and full width at half maximum (FWHM), and a proportional relation between thermal-optic coefficient of material and tuning range. In addition, the cavity is more sensitive to the optical property than the reflection layers according to the analysis of thickness error of the film. And to solve slow thermal response without incurring other performance loss, a novel structure of the suspended cavity is proposed, in which only the cavity is heated.
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Wu, Y., Liu, S., Wei, G. et al. Influence of structure of integrated optical thin-film filter on performance. Sci. China Technol. Sci. 56, 563–566 (2013). https://doi.org/10.1007/s11431-013-5144-2
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DOI: https://doi.org/10.1007/s11431-013-5144-2