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Preparation and characterization of three-dimensional micro-electrode for micro-supercapacitor based on inductively coupled plasma reactive etching technology

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Abstract

The capacity of supercapacitor charge storage depends on the size of the electrode surface area and the active material on the electrodes. To enhance the charge storage capacity with a reduced volume, silicon is used as the electrode material, and three-dimensional electrode structure is prepared to increase the electrode surface area on the footprint area by inductively coupled plasma reactive etching (ICP) techniques. The anodic constant current deposition method is employed to deposit manganese oxide on the electrode surface as the electroactive material. For comparison, samples without slot are prepared with a two-dimensional electrode. Scanning Electron Microscopy (SEM) and Energy Dispersive Spectroscopy (EDS) are used to characterize the surface morphology of the electrode structure and the deposited electroactive material. Electrochemical properties of the electrode are characterized by the cyclic voltammetry (CV) and the constant current charge-discharge method. Experimental results show that our approach can effectively increase the electrode surface area with more electroactive substances, and hence can increase storage capacity of the micro-supercapacitor.

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References

  1. Becker H I. Low voltage electrolytic capacitor. USA patents, 2800616, 1957

  2. Conway B E. Transition from “supercapacitor” to “battery” behavior in electrochemical energy storage. J Electrochem Soc, 1991, 138(6): 1539–1548

    Article  Google Scholar 

  3. Li C S, Qiao Y J, Wu J J, et al. Enhancing the capacitances of electric double layer capacitors based on carbon nanotube electrodes by carbon dioxide activation and acid oxidization. Sci China Tech Sci, 2010, 53(5): 1234–1239

    Article  Google Scholar 

  4. Wang X F, Ruan D B, You Z. Pseudo-capacitive behavior of cobalt hydroxide/carbon nanotubes composite prepared by cathodic deposition. Chin J Chem Phys, 2006, 19(6): 499–505

    Article  Google Scholar 

  5. Yang J J, Huang J J, Jiang Zi Y. Supercapacitance of MnO2 thin film electrodes prepared using jet printing method (in Chinese). Acta Phys Chim Sin, 2007, 23(9): 1365–1369

    Article  Google Scholar 

  6. Pech D, Brunet M, Taberna P L, et al. Elaboration of a microstructured inkjet-printed carbon electrochemical capacitor. J Power Sources, 2009, 195(4): 1266–1269

    Article  Google Scholar 

  7. Miller L M, Ho C C, Shafer P C, et al. Integration of a low frequency, tunable MEMS piezoelectric energy harvester and a thick film micro capacitor as a power supply system for wireless sensor nodes. 2009 IEEE Energy Conversion Congress and Exposition, ECCE 2009, San Jose, CA, USA, 2009. 2627–2634

  8. Jiang Y, Wang P, Zhang J, et al. 3D supercapacitor using nickel electroplated vertical aligned carbon nanotube array electrode. Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on Digital Object Identifier, 2010. 1171–1174

  9. Pech D, Brunet M, Durou H, et al. Ultrahigh-power micrometre-sized supercapacitors based on onion-like carbon. Nat Nanotechnol, 2010, 5(9): 651–654

    Article  Google Scholar 

  10. Sun W, Zheng R, Chen X. Symmetric redox supercapacitor based on micro-fabrication with three-dimensional polypyrrole electrodes. J Power Sources, 2010, 195(20): 7120–7125

    Article  Google Scholar 

  11. Wen C M, Wen Z Y, You Z, et al. Based on SU-8 photoresist of MEMS supercapacitor manganese dioxide electrode preparation and electrochemical characteristics. Proceedings of the 11th Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2011, Seoul, Korea, Cell Bench Research Center, KAIST, 2011. 395–398

  12. Chen W, Beidaghi M, Penmatsa V, et al. Integration of Carbon Nanotubes to C-MEMS for On-chip Supercapacitors. IEEE Trans Nanotechnol, 2010, 9(6): 734–740

    Article  Google Scholar 

  13. Cui X, Hu F, Wei W, et al. Dense and long carbon nanotube arrays decorated with Mn3O4 nanoparticles for electrodes of electrochemical supercapacitors. Carbon, 2010, 49(4): 1225–1234

    Article  Google Scholar 

  14. Liu C C, Tsai D S, Susanti D, et al. Planar ultracapacitors of miniature interdigital electrode loaded with hydrous RuO2 and RuO2 nano rods. Electrochim Acta, 2010, 55(20): 5768–5774

    Article  Google Scholar 

  15. Lin C C, Lin P Y. Capacitance measurements of MnO(x) films deposited by reactive sputtering of a Mn target. Electrochemistry, 2011, 79(6): 458–463

    Article  Google Scholar 

  16. Ji H, Mei Y, Schmidt O G. Swiss roll nanomembranes with controlled proton diffusion as redox micro-supercapacitors. Chem Commun, 2010, 46(22): 3881–3883

    Article  Google Scholar 

  17. Bufon C C B, Gonzlez J D C, Thurmer D J, et al. Self-assembled ultra-compact energy storage elements based on hybrid nano-membranes. Nano Lett, 2010, 10(7): 2506–2510

    Article  Google Scholar 

  18. Beaudrouet E, Le Gal La Salle A, Guyomard Toupin D. Nanostructured manganese dioxides: Synthesis and properties as supercapacitor electrode materials. Electrochim Acta, 2009, 54(4): 1240–1248

    Article  Google Scholar 

  19. Tian Y, Yan J W, Liu X X, et al. Electrochemical capacitance of composites with MnOx loaded on the surface of activated carbon electrodes (in Chinese). Acta Phys Chim Sin, 2010, 26(8): 2151–2157

    Google Scholar 

  20. Cross A, Morel A, Cormie A, et al. Enhanced manganese dioxide supercapacitor electrodes produced by electrodeposition. J Power Sources, 2011, 196(18): 7847–7853

    Article  Google Scholar 

  21. Pang S C, Anderson M A, Chapman T W. Novel electrode materials thin-film ultracapacitors: comparison of sol-gel-derived and electrodeposited manganese dioxide. J Electrochem Soc, 2000, 147(2): 444–450

    Article  Google Scholar 

  22. Reddy R N, Reddy R G. Sol-gel MnO2 as all electrode material for electrochemical capacitors. J Power Sources, 2003, 124(1): 330–337

    Article  Google Scholar 

  23. Fan Z, Chen J H, Wang M Y, et al. Preparation and characterization of manganese oxide/CNT composites as supercapacitive materials. Diam Relat Mater, 2005, 15(9): 1478–1483

    Article  Google Scholar 

  24. Yuan Z Y, Hang Z Z, Du G, et al. A simple method to synthesis single-crystalline manganese oxide nanowires. Chem Phys Lett, 2003, 378(3–4): 349–353

    Article  Google Scholar 

  25. Wang H Q, Yang G, Li Q Y, et al. Porous nano-MnO(2): large scale synthesis via a facile quick-redox procedure and application in a supercapacitor. New J Chem, 2011, 35(2): 469–475

    Article  Google Scholar 

  26. Lee M T, Chang J K, Hsieh Y T, et al. Manganese oxide thin films prepared by potentiodynamic electrodeposition and their super-capacitor performance. J. Solid State Chem., 2010, 14(9): 1697–1703

    Google Scholar 

  27. Fan Z, Chen J, Cui K, et al. Preparation and capacitive properties of cobalt nickel oxides/carbon nanotube composites. Electrochim Acta, 2007, 52(9): 2959–2965

    Article  Google Scholar 

  28. Yoon S, Lee C, Oh M S, et al. Preparation of mesoporous carbon/manganese oxide materials and its application to supercapacitor electrodes. J Non-Cryst Solids, 2008, 355(4–5): 252–256

    Google Scholar 

  29. Lin C C, Lin P Y. Capacitive manganese oxide Thin Films deposited by reactive direct current sputtering. J Electrochem Soc, 2010, 157(7): 753–759

    Article  Google Scholar 

  30. Wen C M, You Z, Wen Z Y, et al. The study of fabrication of three-dimensional micro-electrode structure for MEMS supercapacitor by SU-8 photoresist (in Chinese). J Funct Mater, 2011, 42(s4): 681–684

    Google Scholar 

  31. Lärmer F, Schilp A. Method of Anisotropically Etching Silicon. USA Patent 5501893, 1996

  32. Bhardwaj J, Ashraf H, McQuarrie A. Dry silicon etching for MEMS. The Symposium on Microstructures and Microfabricated Systems. The Annual Meeting of the Electrochemical Society, Montreal, 1997. 1–13

  33. Chang J K, Chen Y L, Tsai W T. Effect of heat treatment on material characteristics and pseudo-capacitive properties of manganese oxide prepared by anodic deposition. J Power Sources, 2004, 135(1–2): 344–353

    Article  Google Scholar 

  34. Shi Y H, Meng H M, Sun D B, et al. The research of manganese oxide coating electrode by anode electrodeposit process (in Chinese). Heat Treat Technol Equip, 2008, 29(1): 39–42

    Google Scholar 

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Authors and Affiliations

  1. Key Laboratory of Fundamental Science on Micro/Nano-Device and System Technology, Chongqing University, Chongqing, 400030, China

    ChunMing Wen & ZhiYu Wen

  2. Microsystem Research Center, Chongqing University, Chongqing, 400030, China

    ChunMing Wen & ZhiYu Wen

  3. Department of Precision Instruments and Mechanics, Tsinghua University, Beijing, 100084, China

    Zheng You & XiaoFeng Wang

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  1. ChunMing Wen
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  2. ZhiYu Wen
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  3. Zheng You
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  4. XiaoFeng Wang
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Correspondence to ChunMing Wen.

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Wen, C., Wen, Z., You, Z. et al. Preparation and characterization of three-dimensional micro-electrode for micro-supercapacitor based on inductively coupled plasma reactive etching technology. Sci. China Technol. Sci. 55, 2013–2018 (2012). https://doi.org/10.1007/s11431-012-4869-7

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  • DOI: https://doi.org/10.1007/s11431-012-4869-7

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