Abstract
As the size of the electronic system continuously reduces, it is very important to develop micro power generator, which has characteristics of small volume, light weight, high energy density and continuous energy supplying. Vibration energy exists widely in daily environment. Micro vibration power generator can harvest and exchange the vibration energy to the electrical energy. Micro electret power generator is one kind of the power generators for harvesting vibration energy and has been paid much attention by researchers. This paper describes the development and status of micro electret power generators, including electret materials and charging methods, vibration energy harvesting structures and conversion efficiency improvement.
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References
Epstein A H, Senturia S D, Anathasuresh G, et al. Power MEMS and microengines. Transducers, 1997; 2: 753–756
Neudecker B J, Zuhr R A, Bates J B. Lithium silicon tinoxynitride (LiSiTON): High-performance anode in thin-film lithiurnion batteries for microelectronics. J Power Sources, 1999; 11: 27–32
Kamarudin S K, Daud W R W, Ho S L, et al. Overview on the challenges and developments of micro-direct methanol fuel cells (DMFC). J Power Sources, 2007; 163: 743–754
Grätzel M. Photoelectrochemical cells. Nature, 2001; 414: 338–344
Zhao J, Zhu D, Zhou Z, et al. Research progress of thermoelectric power generation. Chinese J Power Source, 2010; 34: 310–313
Mizuno M, Chetwynd D. Investigation of a resonance microgenerator. J Micromech Microeng, 2003; 13: 209–216
Leland E S, Lai E M, Wright P K. A self-powered wireless sensor for indoor environmental monitoring. In: Wireless Networking Symposium, Austin, USA: Wireless Networking and Communications Group, 2004
Mitcheson P D, Green T C, Yeatman E M. Power processing circuits for electromagnetic, electrostatic and piezoelectric inertial energy scavengers. Microsyst Technol, 2006; 13: 1629–1635
Glynne-Jones P, Tudor M J, Beeby S P, et al. An electromagnetic, vibration-powered generator for intelligent sensor systems for intelligent sensor systems. Sensors Actuators A: Phys, 2004; 110: 344–349
Kouharenko E, Beeby S P, Tudor M J, et al. Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications. Microsyst Technol, 2006; 12: 1071–1077
Kulah H, Najafi K. An electromagnetic micro power generator for low-frequency environmental vibrations. In: Micro Electro Mechanical Systems-17th IEEE Conference on MEMS, Maastricht, Netherland, 2004. 237–240
Huang W S, Tzeng K E, Cheng M C, et al. Design and fabrication of a vibrational micro-generator for wearable MEMS. In: Proc Eurosensors XVII, Barcelona, Spain, 2003. 695–697
Pérez-Rodríguez A, Serre C, Fondevilla N, et al. Design of electromagnetic inertial generators for energy scavenging applications. In: Proc Eurosensors XIX, Barcelona, Spain, 2005. MC5
Beeby S P, Torah R N, Tudor M J, et al. A micro electromagnetic generator for vibration energy harvesting. J Micromech Microeng, 2007; 17: 1257–1265
Chen P. Research on MEMS-based Micro Power Source. Dissertation of Masteral Degree. Nanjing: Nanjing University of Science and Technology, 2009
Zhang F, Wang L. Modern Piezoelectrics. Beijing: Science Press, 2001
Beeby S P, Tudor M J, White N M. Energy harvesting vibration sources for microsystems applications. Meas Sci Technol, 2006; 17: R175–R195
Boland J, Chao Y H, Suzuki Y, et al. Micro electret power generator. In: Proc 16th IEEE Int Conf Micro Electro Mechanical Systems, Tokyo, Japan, 2003. 538–41
Tsutsumino T, Suzuki Y, Kasagi N, et al. High-performance polymer electret for micro seismic generator. Power MEMS, Tokyo, Japan, 2005; 9–12
Sakane Y, Suzuki Y, Kasagi N. The development of a high-performance perfluorinated polymer electret and its application to micro power generation. J Micromech Microeng, 2008; 18: 104011
Lo H, Tai Y. Parylene-based electrets power generators. J Micromech Microeng, 2008; 18: 104006
Amjadi H, Thielemann C. Silicon-based inorganic electrets for application in micromachined devices. IEEE Trans Dielectr Electr Insul, 1996; 3: 494–498
Zhang J, Zou X, Zhang Y. Improvement on the performance of the PECVD SiO2/Si3N4 double-layer electrets. IEEE Trans Dielectr Electr Insul, 2011; 18: 456–462
Genda T, Tanaka S, Esashi M. Micro-patterned electret for high power electrostatic motor. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Maastricht, Netherland, 2004. 470–473
Hagiwara K, Honzumi M, Goto M, et al. Novel through-substrate charging method for electret generator using soft X-ray irradiation. Power MEMS, Washington DC, USA, 2009. 173–176
Yang Z, Wang J, Zhang J. A micro power generator using PECVD SiO2/Si3N4 double-layer as electret. Power MEMS, Sendai, Japan, 2008. 317–320
Basset P, Galayko D, Paracha A M, et al. A batch-fabricated and electret-free silicon electrostatic vibration energy harvester. J Micromech Microeng, 2009; 19: 115025
Nguyen D S, Halvorsen E. Wideband vibration energy harvesting utilizing nonlinear springs. Power MEMS, Washington DC, USA, 2009. 411–414
Edamoto M, Suzuki Y, Kasagi N, et al. Low-resonant-frequency micro electret generator for energy harvesting application. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Sorrento, Italy, 2009. 1059–1062
Kiziroglou M E, He C, Yeatman E M. Rolling Rod Electrostatic microgenerator. IEEE Trans Indust Electron, 2009; 56: 1101–1108
Lo H, Whang R, Tai Y C. A simple micro electret power generator. In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Hyogo, Japan, 2007. 859–862
Ghalichechian N, Modafe A, Lang J H, et al. Dynamic characterization of a linear electrostatic micromotor supported on microball bearings. Sensors Actuators A, 2007; 136: 416–503
Naruse Y, Matsubara N, Mabuchi K. Electrostatic micro power generation from low-frequency vibration such as human motion. J Micromech Microeng, 2009; 19: 094002
Yang Z, Wang J, Zhang J. A high-performance micro electret power generator based on microball bearings. J Micromech Microeng, 2011; 21: 065001
Sterken T, Fiorini P, Baert K, et al. An electret-based electrostatic u-generator. Transducers, 2003; 2: 1291–1294
Zhang G, Ye Z. Feasibility of a multi-layer electrostatic micro energy harvester for higher power output. Power MEMS, Washington DC, USA, 2009. 340–343
Tang B, Wen Z, Wen Z. Calculation and simulation of MEMS electret-based micro vibration power generator. Micronanoelectro Techn, 2007; 9: 881–891
Miki D, Honzumi M, Suzuki Y, et al. MEMS electret generator with electrostatic levitation. Power MEMS, Washington DC, USA, 2009. 169–172
Tsutsumino T, Suzuki Y, Kasagi N, et al. Efficiency evaluation of micro seismic electret power generator. In: Proceedings of Sensor Symposium, Takamatsu, Japan, 2006. 521–524
Hoffmann D, Spreemann D, Folkmer B, et al. A novel comcept for self-aligning generators. Power MEMS, Washington DC, USA, 2009. 304–307
Yang B, Lee C, Kotlanka R K, et al. A MEMS rotary comb mechanism for harvesting the kinetic energy of planar vibrations. J Micromech Microeng, 2010; 20: 065011
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Yang, Z., Wang, J. & Zhang, J. Research and development of micro electret power generators. Sci. China Technol. Sci. 55, 581–587 (2012). https://doi.org/10.1007/s11431-011-4710-8
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DOI: https://doi.org/10.1007/s11431-011-4710-8