Abstract
Si-doped (11–20) a-plane GaN grown on (1–102) r-plane sapphire substrate was obtained by metal organic chemical vapor deposition. The optical and electrical properties of the Si-doped a-plane GaN films were investigated by photoluminescence spectroscopy, high-resolution X-ray diffraction, atomic force microscopy and Hall measurement. The results showed that the morphology and the crystal quality slightly degraded with Si doping. The yellow luminescence was enhanced with increasing the flow rate of the SiH4. The significant improvement of the mobility should associate with some of the vacancy filled with the Si.
Similar content being viewed by others
References
Huang J J, Shen K C, Shiao W Y, et al. Improved a-plane GaN quality grown with flow modulation epitaxy and epitaxial lateral overgrowth on r-plane sapphire substrate. Appl Phys Lett, 2008, 92(23): 231902
Bastek B, Bertram F, Christen J, et al. A-plane GaN epitaxial lateral overgrowth structures: Growth domains, morphological defects, and impurity incorporation directly imaged by cathodoluminescence microscopy. Appl Phys Lett, 2008, 92(2): 212111
Chen H G, Ko T S, Chang L, et al. Investigation on microstructure in GaN epitaxial growth on the stripe-patterned r-plane sapphire substrates. J Cryst Growth, 2008, 310(7–9): 1627–1631
Kuroda M, Ishida H, Ueda T, et al. Nonpolar (11–20) plane AlGaN/ GaN heterojunction field effect transistors on r (1–102) plane sapphire. J Appl Phys, 2007, 102(9): 093703
Imer B, Wu F, Speck J S, et al. Growth evolution in sidewall lateral epitaxial over growth (SLEO). J Cryst Growth, 2007, 306(2): 330
Wang H, Chen C Q, Gong Z, et al. Anisotropic structural characteristics of (11–20) GaN templates and coalesced epitaxial lateral overgrown films deposited on (10–12) sapphire. Appl Phys Lett, 2004, 84(4): 499–501
Hollander J L, Kappers M J, McAleese C, et al. Improvements in a-plane GaN crystal quality by a two-step growth process. Appl Phys Lett, 2008, 92(10): 101104
Wu Z H, Fischer M A, Ponce F A, et al. Role of the buffer layer thickness on the formation of basal plane stacking faults in a-plane GaN epitaxy on r-sapphire. Appl Phys Lett, 2008, 93(1): 011901
Zhao D G, Jiang D S, Zhu J J, et al. Role of edge dislocation and Si impurity in linking the blue luminescence and yellow luminescence in n-type GaN films. Appl Phys Lett, 2009, 95(4): 041901
Özgür Ü Ü, Ni X, Fu Y, et al. Near-field scanning optical microscopy and time-resolved optical characterization of epitaxial lateral overgrown c-plane and a-plane GaN. Appl Phys Lett, 2006, 89(26): 262117
Reshchikov M A. Luminescence properties of defects in GaN. J Appl Phys, 2005, 97(6): 061301
Neugebauer J, VandeWalle C G. Gallium vacancies and the yellow luminescence in GaN. Appl Phys Lett, 1998, 69(4): 1995
Sathish N, Dhamodaran S, Pathak A P, et al. HRXRD, AFM and optical study of damage created by swift heavy ion irradiation in GaN epitaxial layers. Phys Res B, 2007, 256(6): 281–287
Gao Z Y, Hao Y, Li P X, et al. Role of lateral growth on the structural properties of high temperature GaN layer. Sci China Ser E-Tech Sci, 2009, 52(5): 1242–1247
Ma B, Miyagawa R, Hu W. Structural and electrical properties of Si-doped a-plane GaN grown on r-plane sapphire by MOVPE. J Cryst Growth, 2009, 311(10): 2899–2902
Yu H B, Chen H, Li D S, et al. Photoluminescence study of Si-doped (11–20) a-plane GaN grown on (1–102) r-plane sapphire by metalorganic chemical vapor deposition. J Cryst Growth, 2004, 263(1–4): 94–98
Xu H Z, Bell A, Wang Z G, et al. Competition between band gap and yellow luminescence in undoped GaN grown by MOVPE on sapphire substrate. J Cryst Growth, 2001, 222(1–2): 96–103
Author information
Authors and Affiliations
Corresponding author
Rights and permissions
About this article
Cite this article
Xu, S., Zhou, X., Hao, Y. et al. Optical and electrical properties of Si-doped in a-plane GaN grown on r-plane sapphire. Sci. China Technol. Sci. 53, 2363–2366 (2010). https://doi.org/10.1007/s11431-010-4049-6
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11431-010-4049-6