Abstract
A simple, low cost method for mass production to enhance the light extraction efficiency of GaN-related LEDs was proposed. With appropriate process parameters, the nature lithography of nanosphere can be used to fabricate two-dimensional nanostructures, including the nanomesh ZnO layer, photonic crystal (PhC) patterned p-GaN, and patterned sapphire substrates. Based on preliminary results, the extraction efficiencies of LEDs with these nanostructures can thus be improved and the nature lithography is demonstrated to be a promising method to be widely exploited in the manufacture of all kinds of LED devices.
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Su, Y., Huang, C., Chen, J. et al. Improvement of extraction efficiency for GaN-based light emitting diodes. Sci. China Technol. Sci. 53, 322–325 (2010). https://doi.org/10.1007/s11431-010-0061-0
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DOI: https://doi.org/10.1007/s11431-010-0061-0