Abstract
BaTiO3 films were prepared by microarc oxidation (MAO) with an in-house built alternating current (AC) power supply in Ba(OH)2 solution in this study. The surface morphology, combinability with the substrate and phase composition of the films were investigated by XRD, SEM and TEM. The BaTiO3 films were annealed at a temperature range of 900 to 1200°C and phase compositions were tested thereafter. The results showed that the BaTiO3 films were mainly composed of the primitive hexagonal phase with relatively small amount of tetragonal and amorphous phases. Moreover, the amount of amorphous phase decreased with the time of annealing. The transformation of BaTiO3 from hexagonal structure to tetragonal stucture became obvious until the annealing temperature reached 1200°C. The film consisted mainly of BaTiO3 tetragonal structure with ferroelectric property. The influence of annealing on surface morphology and mechanism of phase transformation of the films were also discussed.
Similar content being viewed by others
References
Jaya P N, Natalie S, Vera L, et al. Structure of BaTiO3 thin films modified by film-substrate interaction. Mater Sci Semicond Process, 2002, 5(2–3): 195–197
Kreutz E W, Gottmann J. PLD of perovskite coatings for optoelectronics, microelectronics, and microtechnology. J Eur Ceram Soc, 2004, 24(6): 979–984
Zeng J M, Wang H, Wang M, et al. Preparation and ferroelectric properties of BaTiO3 thin films by atmospheric-pressure metalorganic chemical vapor deposition. Thin Solid Films, 1998, 322(1): 104–107
Khodorov A, Pereira M, Gomes M J M. Structure and dielectric properties of sol-gel 9/65/35 PLZT thin films. J Eur Ceram Soc, 2005, 25(12): 2285–2288
McCormick M A, Slamovich E B. Microstructure development and dielectric properties of hydrothermal BaTiO3 thin films. J Eur Ceram Soc, 2003, 23(12): 2143–2152
Kuang Y F, Xu Y, Li G X. Research advances on the surface treatment of aluminum and its alloy (in Chinese). Plat Finish, 2000, 22(1): 16–21
Song R B, Zuo H B, Ji Z S. The development of plasma enhance electro-chemical surface ceramic-coating on light alloy (in Chinese). Light Alloy Fabr Technol, 2003, 31(2): 8–11
Yerokin A L, Nie X, Matthews A, et al. Plasma electrolysis for surface engineering. Surf Coat Tech, 1999, 122(2–3): 73–93
Xue W B, Deng Z W, Lai Y C, et al. Size change of LY12 aluminum alloy in process of microarc oxidation (in Chinese). Trans Nonferrous Metal Soc Ch, 1997, 7(3): 140–143
Apelfeld A V, Bespalova O V, Borisov A M, et al. Application of the particle backscattering methods for the study of new oxide protective coatings at the surface of Al and Mg Alloys. Nucl Instrum Meth Phys Res B, 2000, 161–163(3): 553–557
Qu Y F. The Physical Properties of Functional Ceramics. Beijing: Chemical Industry Press, 2007. 120–124
Guo H F, Zhang X T, Liu B, et al. Preparation of nanometer-sized BaTiO3 crystallites by sol-gel method and size effects on structure. Acta Phys-Chim Sin, 2004, 20(2): 164–168
Author information
Authors and Affiliations
Corresponding author
Additional information
Supported by Guangdong Natural Science Foundation (Grant No. 0500649)
Rights and permissions
About this article
Cite this article
Huang, W., Li, W. & Han, B. Study on BaTiO3 films prepared by AC power microarc oxidation. Sci. China Ser. E-Technol. Sci. 52, 2195–2199 (2009). https://doi.org/10.1007/s11431-009-0231-0
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11431-009-0231-0