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AFM based anodic oxidation and its application to oxidative cutting and welding of CNT

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Abstract

Probe anodic oxidation by atomic force microscope (AFM) is one of the most important techniques in fabricating nano structures and devices. The technique was further studied in this paper. By analyzing the distribution of the electric field on substrate surface the dependence of oxide characters on field was discussed. The impacts of various parameters on oxide fabrication were experimentally studied. Based on these studies, we realized the oxidative cutting and welding of carbon nanotube (CNT) by the AFM based oxidation technique and provided a novel technique for the assembly and fabrication of CNT based nano devices.

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References

  1. Day H C, Allee D R. Selective area oxidation of silicon with a scanning force microscope. Appl Phys Lett, 1993, 62(21): 2691–2693

    Article  Google Scholar 

  2. Snow E S, Juan W H, Pang S W, et al. Si nanostructures fabricated by anodic oxidation with an atomic force microscope and etching with an electron cyclotron resonance source. Appl Phys Lett, 1995, 66(14): 1729–1731

    Article  Google Scholar 

  3. Dagata J A. Device fabrication by scanned probe oxidation. Science, 1995, 270(5242): 1625–1626

    Article  Google Scholar 

  4. García R, Calleja M, Pérez-Murano F. Local oxidation of silicon surfaces by dynamic force microscopy: Nanofabrication and water bridge formation. Appl Phys Lett, 1998, 72(18): 2295–2297

    Article  Google Scholar 

  5. Tello M, García R. Nano-oxidation of silicon surfaces: Comparison of noncontact and contact atomic-force microscopy methods. Appl Phys Lett, 2001, 79(3): 424–426

    Article  Google Scholar 

  6. Hu X D, Hu X T, Chen J P. Nanometer-scale oxidation structures produced by conductive atomic force microscope (in Chinese). J Tianjin Univ, 2001, 34(2): 150–153

    Google Scholar 

  7. Hu X D, Hu X T. Analysis of the process of anodization with AFM. Ultramicroscopy, 2005, 105(1–4): 57–61

    Article  Google Scholar 

  8. Johannes M S, Cole D G, Clark R L. Three-dimensional design and replication of silicon oxide nanostructures using an atomic force microscope. Nanotechnology, 2007, 18(34): 345304

    Article  Google Scholar 

  9. Snow E S, Campbell P M. AFM fabrication of sub-10-nanometer metal-oxide devices with in situ control of electrical properties. Science, 1995, 270(5242): 1639–1641

    Article  Google Scholar 

  10. Snow E S, Park D, Campbell P M. Single-atom point contact devices fabricated with an atomic force microscope. Appl Phys Lett, 1996, 69(2): 269–271

    Article  Google Scholar 

  11. Xie X N, Chung H J, Sow C H, et al. Native oxide decomposition and local oxidation of 6H-SiC (0001) surface by atomic force microscopy. Appl Phys Lett, 2004, 84(24): 4914–4916

    Article  Google Scholar 

  12. Graf D, Frommenwiler M, Studerus P, et al. Local oxidation of Ga[Al]As heterostructures with modulated tip-sample voltages. J Appl Phys, 2006, 99(5): 053707

    Article  Google Scholar 

  13. Lyuksyutov S F, Vaia R A, Paramonov P B, et al. Electrostatic nanolithography in polymers using atomic force microscopy. Nat Mater, 2003, 2(7): 468–472

    Article  Google Scholar 

  14. Xie X N, Chung H J, Sow C H, et al. Water-bridge-assisted ionic conduction in probe-induced conical polymer pattern formation. Adv Mater, 2005, 17(11): 1386–1390

    Article  Google Scholar 

  15. Gomer R. Extensions of the field-emission fluctuation method for the determination of surface diffusion coefficients. Appl Phys A, 1986, 39(1): 1–8

    Article  Google Scholar 

  16. Stiévenard D, Fontaine P A, Dubois E. Nanooxidation using a scanning probe microscope: An analytical model based on field induced oxidation. Appl Phys Lett, 1997, 70(24): 3272–3274

    Article  Google Scholar 

  17. Park J Y, Yaish Y, Brink M, et al. Electrical cutting and nicking of carbon nanotubes using an atomic force microscope. Appl Phys Lett, 2002, 80(23): 4446–4448

    Article  Google Scholar 

  18. Kim D H, Koo J Y, Kim J J. Cutting of multiwalled carbon nanotubes by a negative voltage tip of an atomic force microscope: A possible mechanism. Phys Rev B, 2003, 68(11): 113406

    Article  Google Scholar 

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Authors and Affiliations

  1. State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110016, China

    NianDong Jiao, YueChao Wang & ZaiLi Dong

  2. Department of Electrical and Computer Engineering, Michigan State University, East Lansing, 48824, USA

    Ning Xi

Authors
  1. NianDong Jiao
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  2. YueChao Wang
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  3. Ning Xi
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  4. ZaiLi Dong
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Correspondence to NianDong Jiao.

Additional information

Supported by the National Natural Science Foundation of China (Grant No. 60635040) and Nation High technology Research and Development Program of China (“863” Program) (Grant No. 2009AA03Z316)

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Jiao, N., Wang, Y., Xi, N. et al. AFM based anodic oxidation and its application to oxidative cutting and welding of CNT. Sci. China Ser. E-Technol. Sci. 52, 3149–3157 (2009). https://doi.org/10.1007/s11431-009-0154-9

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  • DOI: https://doi.org/10.1007/s11431-009-0154-9

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