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Development of silicon-based microelectrode array

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Abstract

This paper introduces in details a kind of silicon-based microelectrode array. MEMS (micro-electromechanical system) technology is used in the fabrication of the microelectrode array, which is designed to perform signal recording and electrical stimulation for nerves in neural engineering. A simple fabrication process is developed. An improved model of microelectrodes is brought forward and successfully validated by the excellent match between circuit simulations and electrical measurements, including both magnitude and phase of microelectrode impedance. Compared with the simple one that is usually used, the improved model is believed to be an advance and more accurate. This modeling helps to improve the design of microelectrodes and understand the behavior of interface between electrode and cell. Furthermore, the microelectrode is proved to be a feasible tool for researches in neural engineering by successfully recording neural activities of sciatic nerve of a bullfrog.

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Authors and Affiliations

  1. Institute of Microelectronics, Tsinghua University, Beijing, 100084, China

    JianHui Lin, XiaoMing Wu, PengSheng Huang, TianLing Ren & LiTian Liu

  2. Tsinghua National Laboratory for Information Science and Technology, Beijing, 100084, China

    JianHui Lin, XiaoMing Wu, PengSheng Huang, TianLing Ren & LiTian Liu

  3. Yangtze Delta Region Institute of Tsinghua University, Jiaxing, 314050, China

    JianHui Lin & XiaoMing Wu

  4. State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Shanghai, 200050, China

    XiaoMing Wu

  5. Department of Biomedical Engineering, Tsinghua University, Beijing, 100084, China

    Lei Feng

Authors
  1. JianHui Lin
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  2. XiaoMing Wu
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  3. PengSheng Huang
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  4. Lei Feng
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  5. TianLing Ren
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  6. LiTian Liu
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Corresponding author

Correspondence to XiaoMing Wu.

Additional information

Supported by the Natural Science Foundation of Zhejiang Province of China (Grant No. Y106448) and State Key Laboratories of Transducer Technology (Grant No. SKT0506)

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Lin, J., Wu, X., Huang, P. et al. Development of silicon-based microelectrode array. Sci. China Ser. E-Technol. Sci. 52, 2391–2395 (2009). https://doi.org/10.1007/s11431-008-0176-8

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  • DOI: https://doi.org/10.1007/s11431-008-0176-8

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