Abstract
The effect of the annealing temperature T a on the optical, electrical and structural properties of the In2S3 films obtained by the spray pyrolysis method at 350°C substrate temperature was studied. All the In2S3 films annealed in the range from 100 to 400°C are polycrystalline with (220) preferential orientation. The resistivity decreases as T a increases until it reaches a value of 25 Ohm-cm for T a=400°C. The grain size also increases when T a increases as observed in data calculated from X-ray measurements. XRD data indicates that samples show microstructural perfection improvement as a function of annealing temperature.
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Seyam M A M. Optical and electrical properties of indium monosulfide (InS) thin films. Vacuum, 2001, 63: 441–447
Hara K, Sayama K, Arakawa H. Semiconductor-sensitized solar cells based on nanocrystalline In2S3/In2O3 thin film electrodes. Sol Energy Mater Sol Cells, 2001, 62: 441–447
Shay J L, Tell B. Energy band structure of I–III–VI2 semiconductors. Surf Sci, 1973, 37: 748–762
George J, Joseph K S, Prodeep B, et al. Reactively evaporated films of indium sulphide. Phys Status Solidi, Appl Res, 1988, 106: 123
Barreau N, Bernède J C, Marsillac S, et al. New Cd-free buffer layer deposited by PVD: In2S3 containing Na compounds. Thin Solid Films, 2003, 431: 326–329
Bube R H, McCarroll W H. Photoconductivity in indium sulfide powders and crystals. J Phys Chem Solids. 1959, 10(4): 333–335
Yukawa T, Kuwabara K, Koumoto K. Electrodeposition of CuInS2 from aqueous solution (II) electrodeposition of CuInS2 film. Thin Solid Films, 1996, 286: 151–153
Belgacem S, Amlouk M, Bennaceur R. The effect of Cu/In ratio on the structure of thin films of CuInS2 made by airless spraying (in French.). Rev Phys Appl, 1990, 25(12): 1213–1223
Kazuki I M, Nakamura T A, Arai E. Photochemical deposition of Se and CdSe films from aqueous solutions. Thin Solid Films, 2001, 384: 157–159
John T T, Bini S, Kashiwaba Y, et al. Characterization of spray pyrolysed indium sulfide thin films. Semicond Sci Technol, 2003, 18: 491
Kumaresan R, Ichimura M, Sato N, et al. Application of novel photochemical deposition technique for the deposition of indium sulfide. Mater Sci Eng B Solid-State Mater Adv Technol, 2002, 96: 37–42
Kamoun N, Bennaceur R, Amlouk M, et al. L. Optical properties of InS layers deposited using an airless spray technique. Phys Status Solidi (a), 1998, 169(1): 97–104
Bouguila N, Bouzouita H, Lacaze E, et al. Effet de la température de fabrication sur les propriétés structurales et morphologiques des couches épaisses de In2S3 “spray”. J Phys III France, 1997, 7(8): 1647–1660
Naghavi N, Henriquez R, Laptev V, et al. Growth studies and characterisation of In2S3 thin films deposited by atomic layer deposition (ALD). Appl Surf Sci, 2004, 222: 65–73
Asikainen T, Ritala M, Leskelä M. Growth of In2S3 thin films by atomic layer epitaxy. Appl Surf Sci, 1994, 82/83: 122–125
George J, Joseph K S, Pradeep B, et al. Reactively evaporated films of indium sulphide. Phys Status Solidi (a), 1988, 106(1): 123–131
El Shazly A A, Abd Elhady D, Metwally H S, et al. Electrical properties of β-In2S3 thin films. J Phys: Condensed Matter, 1998, 10(26): 5943
Guillén C, García T, Herrero J, et al. Tailoring growth conditions for modulated flux deposition of In2S3 thin films. Thin Solid Films, 2004, 451/452: 112–115
Diehl R, Nitsche R. Vapour growth of three In2S3 modifications by iodine transport. J Cryst Growth, 1975, 28: 306–310
Bessergenev V G, Ivanova E N, Kovalevskaya Yu A, etal. Electrical properties of conductive In2S3 and In2O3S films prepared from the In(S2COC3H7-iso)3 volatile precursor. Inorganic Mater, 1996, 32(6): 592
Hai-Ning C, Xi S Q, The fabrication of dipped CdS and sputtered ITO thin films for photovoltaic solar cells. Thin Film Solids, 1996, 288: 325–329
Morgan D V, Aliyu Y H, Bunce R. W, Salehi A. Annealing effects on opto-electronic properties of sputtered and thermally evaporated indium-tin-oxide films. Thin Solid Films, 2004, 84: 126–130
Bhatti M T, Rana A M, Khan A F. Characterization of rf-sputtered indium tin oxide thin films. Mater Chem Phys, 2004, 84: 126–130
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Bedir, M., Öztas, M. Effect of air annealing on the optical electrical and structural properties of In2S3 films. Sci. China Ser. E-Technol. Sci. 51, 487–493 (2008). https://doi.org/10.1007/s11431-008-0074-0
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DOI: https://doi.org/10.1007/s11431-008-0074-0