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High hydrosilylation efficiency of porous silicon SiHx species produced by Pt-assisted chemical etching for biochip fabrication

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Abstract

Porous silicon (PSi) prepared from Pt metal-assisted chemical etching (MaCE) was demonstrated to possess higher hydrosilylation efficiency (∼57%) than anodized PSi (∼11%) by surface reaction with ω-undecenyl alcohol (UO). Deconvolution of the SiHx (x = 1-3) stretching bands revealed the abundance of SiH2 species on MaCE PSi was 53%, ∼10% higher than on anodized samples, while both of SiH1 and SiH3 were ∼5% lower correspondently on MaCE PSi than on anodized samples. The surface SiHx abundances were suggested to account for the higher hydrosilylation efficiency on MaCE PSi. Optimization of Pt-assisted chemical etching parameters suggested a 7–15 nm thick Pt-coating and an etching time of 3–10 min for biochip applications. Scanning electron microscopy images revealed that an isotropic top meso-porous layer was beneficial for hydrosilylation and long-term durability under ambient conditions. To end, an example of histidine-tagged protein immobilization and microarray was illustrated. Combining the materials’ property, surface chemistry, and micro-fabrication technology together, we envision that silicon based biochip applications have a prosperous future.

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Authors and Affiliations

  1. State Key Laboratory of Coordination Chemistry, School of Chemistry and Chemical Engineering, Nanjing National Laboratory of Microstructures, Nanjing University, Nanjing, 210093, China

    MinYu Xiao, HuanMei Han & ShouJun Xiao

  2. Jinan Entry-Exit Inspection and Quarantine Bureau Inspection, Jinan, 250014, China

    HuanMei Han

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  1. MinYu Xiao
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  2. HuanMei Han
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  3. ShouJun Xiao
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Correspondence to ShouJun Xiao.

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Xiao, M., Han, H. & Xiao, S. High hydrosilylation efficiency of porous silicon SiHx species produced by Pt-assisted chemical etching for biochip fabrication. Sci. China Chem. 56, 1152–1163 (2013). https://doi.org/10.1007/s11426-013-4849-1

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