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A Compact ESPI System for Measuring 3D Displacements

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Abstract

Background

The ESPI technique provides a sensitive method for measuring surface displacements. However, typical interferometers for 3-D measurements are complex and require numerous optical components and sophisticated lasers.

Objective

The objective here is to design and demonstrate a relatively simple 3-D interferometer that uses diffraction gratings instead of beam splitters. This feature equalizes all optical path lengths and makes it possible to use a simple diode laser as light source.

Results

Two main in-plane ESPI interferometers with different incidence angles are combined to form an additional four sensitivity vectors capable of measuring in-plane and out-of-plane displacements. Thus, a total of 6 independent measurements are available. A prototype device was designed and built to test the 3-D displacement measurement capabilities. The interferometer was shown to be capable of measuring simultaneous 3-D displacements with accuracy in the range 0.01 to 0.05 µm in the X and Y axes and 0.03 to 0.09 µm in the Z axis.

Conclusions

The results demonstrate the effectiveness of the proposed 3-D interferometer design. The use of parallelogram beam geometry or of specific current and temperature controls are effective to accommodate the low coherence of a laser diode.

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Acknowledgements

This work was financially supported by the Natural Sciences and Engineering Research Council of Canada (NSERC).

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Authors and Affiliations

  1. Universidade Federal de Santa Catarina, Florianópolis, Brazil

    F. Zanini Broetto

  2. University of British Columbia, Vancouver, Canada

    G. S. Schajer

Authors
  1. F. Zanini Broetto
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  2. G. S. Schajer
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Correspondence to G. S. Schajer.

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Broetto, F.Z., Schajer, G.S. A Compact ESPI System for Measuring 3D Displacements. Exp Mech 62, 471–482 (2022). https://doi.org/10.1007/s11340-021-00802-w

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