Skip to main content
SpringerLink
Log in

Effect of Thin Films on Dynamic Performance of Resonating MEMS

  • Published:
Experimental Mechanics Aims and scope Submit manuscript

Abstract

Continued advances in microelectromechanical systems (MEMS) technology have led to development of a multitude of new sensors and their corresponding advanced applications. Great many of these sensors (e.g., microgyroscopes, accelerometers, biological, chemical, security, medical, etc.) rely on either sensing elements or elastic suspensions that resonate. Regardless of their applications, sensors are always designed to provide the most exact responses to the signals they are developed to detect and/or monitor. One way to quantify this exactness is to use the Quality factor (Q-factor). MEMS sensors are typically fabricated out of materials that are mechanically sound at the microscale, but can be relatively poor electrical conductors. For this reason, areas of MEMS are coated with various thin metal films to provide electrical pathways. These films, however, adversely alter resonant properties of a device. To facilitate our study, microcantilever configurations were selected to test influence that thin metal films have on resonators. This paper reviews a theoretical analysis of the effect that thermoelastic internal friction has on the Q-factor of microscale resonators and shows that the internal friction relating to TED is a fundamental damping mechanism in determination of quality of high-Q resonators over a range of operating conditions. Using silicon microcantilevers coated with aluminum films from 5 nm to 30 nm thick, on one as well as both sides, Q-factors were experimentally determined using the ring-down method. From the ring-down curve, the Q-factor of each microcantilever was determined. Experimental results show that as thickness of the aluminum film increases, Q-factor of the device decreases. Comparison of analytical and experimental results indicates good correlation, well within the limits based on uncertainty analysis. In addition, preliminary results also show a significant temperature dependence of the Q-factor of aluminum coated microcantilevers.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9

Similar content being viewed by others

References

  1. Pryputniewicz RJ (2007) “MEMS: recent advances and current challenges”, Fracture of nano and engineering materials and structures (ECF16). Springer, Dordrecht, p 21

    Google Scholar 

  2. Hansen DS, Marinis TF, Furlong C, Pryputniewicz RJ (2001) Advances in optimization of MEMS inertial sensor packaging. Proc. Internat. Congress on Exp. and Appl. Mech. for Emerging Technologies, SEM, Bethel, CT, pp 821–825

  3. Sumali A, Epp DS, Filcher CW (2004) The use of modal analysis as part of quality control in micro fabricated devices. Proc. XXIII Internat. Modal Analysis Conf. (IMAC-XXIII), Orlando, FL, pp 410–416

  4. Marinis TF, Soucy JW, Hanson DS, Pryputniewicz RJ, Marinis RT, Klempner AR (2006) Isolation of MEMS devices from package stresses by use of compliant metal interposers. Proc. 56th IEEE Electronic Components & Technology Conf. (56th-IEEE-ECTC), paper No. P1S25-MEMS, San Diego, CA

  5. Duesterhaus MA, Bateman VI, Hoke DA (2004) Shock testing of MEMS devices. Proc. 4th Internat. Symp. on MEMS and Nanotechnology (4th-ISMAN), Costa Mesa, CA, pp 104–109

  6. Bedrossian NS (2001) International space station assembly and operation control challenges. Draper Technol Dig 5:22–35

    Google Scholar 

  7. Hopkins RE, Borenstein JT, Antkowiak BM, Ward PA, Elliot RD, Weinberg MS, Dopier MD, Mila JA (2001) The silicon oscillating accelerometer: a MEMS inertial instrument for strategic missile guidance. Draper Technol Dig 5:44–51

    Google Scholar 

  8. Ruffin P (2004) MEMS/nanotechnology: an emerging technology for small low-cost precision strike weapons. Proc. 4th Internat. Symp. on MEMS and Nanotechnology (4th-ISMAN), Costa Mesa, CA, pp 1–9

  9. Gaytsch S, Staufer U, Akiyama T, Hidber HR, Tonin A, Howld L, Müller D, De Rooij ND (2003) Technological and scientific challenges of atomic force microscopy on Mars. Proc. 4th Internat. Symp. on MEMS and Nanotechnology (4th-ISMAN), Charlotte, NC, pp 79–84

  10. Gluck N, Last HR (2004) MEMS: military and potential Homeland Security applications. Proc. 4th Internat. Symp. on MEMS and Nanotechnology (4th-ISMAN), Costa Mesa, CA, pp 320–326

  11. Buser A, De Rooij ND (1989) Resonant silicon structures. Sensors Actuators 17:145–154

    Article  Google Scholar 

  12. Duwel A, Weinstein M, Gorman J, Borenstein J, Ward P (2002) Quality factors of MEMS gyros and the role of thermoelastic damping. IEEE-press, Piscataway, pp 214–219

    Google Scholar 

  13. Zener C (1937) Internal friction in solids (I – Theory of internal friction in reeds). Phys Rev 52:230–235

    Article  MATH  Google Scholar 

  14. Zener C (1938) Internal friction in solids (II – General theory of thermoelastic internal friction). Phys Rev 53:90–99

    Article  MATH  Google Scholar 

  15. Rose R, Zener C (1939) Intercrystalline thermal currents as a source of internal friction. Phys Rev 56:343–349

    Article  Google Scholar 

  16. Pryputniewicz RJ, Furlong C, Pryputniewicz EJ (2002) Optimization of contact dynamics for a RF MEMS switch. Paper No. IMECE2002-39504, ASME - Am Soc Mech Eng, New York, NY

  17. Khaled ARA, Vafai K, Yang M, Zhang X, Ozkan CS (2003) Analysis, control, and augmentation of microcantilever deflections in biosensing systems. Sensors Actuators B 94:103–115

    Article  Google Scholar 

  18. Yue M, Lin H, Dedrick DE, Satyanarayana S, Majumdar A, Bedekar AS, Jenkins JW, Sundaram S (2004) A 2D microcantilever array for multiplexed biomolecular analysis. JMEMS 13:290–299

    Google Scholar 

  19. Ziegler C (2004) Cantilever-based biosensors. Anal Bioanal Chem 379:949–959

    Google Scholar 

  20. Pryputniewicz RJ (2001) Integrated thermomechanical design and analysis with applications to microsystems. Worcester Polytechnic Institute, Worcester

    Google Scholar 

  21. Pryputniewicz RJ (2002) Thermodynamics of microsystems. Worcester Polytechnic Institute, Worcester

    Google Scholar 

  22. Pryputniewicz RJ (1985) Engineering experimentation. Worcester Polytechnic Institute, Worcester

    Google Scholar 

  23. Leissa A (1993) Vibration of plates, Originally issued by NASA in 1973, subsequently reprinted by Acoustical Society of America/American Institute of Physics in 1993

  24. Gorman DJ (1982) Free vibration analysis of rectangular plates. Elsevier, New York

    MATH  Google Scholar 

  25. Pryputniewicz RJ (2006) Advances in optoelectronic metrology: from milliscale to nanoscale applications. Proc. 7th Internat. Symp. on MEMS and Nanotechnology (7th-ISMAN), St. Louis, MO, pp 1–17

  26. Pryputniewicz RJ (2007) Progress in microelectromechanical systems. Strain 43:13–25

    Article  Google Scholar 

  27. Furlong C, Pryputniewicz RJ (2007) Integrated approach to development of microelectronic contacts. Paper No. IPACK2007-33345, ASME – Am Soc Mech Eng, New York, NY

  28. Pryputniewicz RJ, Pryputniewicz EJ (2007) Quantitative characterization of microsystem dynamics. Paper No. IPACK2007-33503, ASME – Am Soc Mech Eng, New York, NY

  29. DeVoe DL, Pisano AP (1997) Modeling and optimal design of piezoelectric cantilever microactuators. J Microelectromech Syst 6:266–270

    Article  Google Scholar 

  30. Chu WH, Mehregany M, Mullen RL (1993) Analysis of tip deflection and force of a bimetallic cantilever microactuator. J Micromech Microeng 3:4–7

    Article  Google Scholar 

  31. Gibson RF, Liu ZG, Srinivasan N (2005) Influence of bending-extension coupling on the modal frequencies of nonsymetrically laminated MEMS microcantilevers. J Microelectromech Syst 14:1236–1243

    Article  Google Scholar 

  32. Vengallatore S (2004) Analysis of thermoelastic damping in laminated composite micromechanical beam resonators. J Micromech Microeng 15:2398–2404

    Article  Google Scholar 

  33. Duwel A, Weinstein M, Gorman J, Borenstein J, Ward P (2003) Quality factors of MEMS gyros and the role of thermoelastic damping. Draper Technol Dig 7:36–40

    Google Scholar 

  34. Yue M, Lin H, Dedrick DE, Satyanarayana S, Majumdar A, Bedekar AS, Jenkins JW, Sundaram S (2004) A 2-D microcantilever array for multiplexed biomolecular analysis. J Microelectromech Syst 13:290–299

    Article  Google Scholar 

  35. Arecco D, Pryputniewicz R (2003) Design and analysis of MEMS chemical sensor. Proc. 4th Internat. Symp. On MEMS and Nanotechnology (4-ISMAN), Charlotte, NC, pp 211–216

  36. Battison FM, Ramseyer JP, Lang HP, Baller MK, Gerber C, Gimzewski JK, Meyer E, Guntherodt HJ (2001) A chemical sensor based on a microfabricated cantilever array with simultaneous resonance frequency and bending readout. Sens Actuators B, Chem 77:122–131

    Article  Google Scholar 

  37. Matsuura T, Fukami T, Chabloz M, Sakai Y, Izuo S, Uemura A, Kaneko S, Tsutsumi K, Hamanaka K (2000) Silicon micro optical switching device with an electromagnetically operated cantilever. Sens Actuators 83:220–224

    Article  Google Scholar 

  38. Selvakumar A, Najafi K (2003) Vertical comb array microactuators. J Microelectromech Syst 12:440–449

    Article  Google Scholar 

  39. Binnig G, Quate CF, Gerber C (1986) Atomic force microscopes. Phys Rev Lett 56:930–933

    Article  Google Scholar 

  40. Grow RJ, Minne SC, Manalis SR, Quate CF (2002) Silicon nitride cantilevers with oxidation-sharpened silicon tips for atomic force microscopy. J Microelectromech Syst 11:317–321

    Article  Google Scholar 

  41. Mamin H, Fan L, Hoen S, Rugar D (1995) Tip-based data storage using micromechanical cantilevers. Sens Actuators 48:215–219

    Article  Google Scholar 

  42. Vettiger P, Cross G, Despont M, Drechsler U, Durig U, Gotsmann B, Haberle W, Lantz M, Rothhuizen H, Stutz R, Binnig G (2002) The millipede-nanotechnology entering data storage. IEEE Trans Nanotechnol 1:39–55

    Article  Google Scholar 

  43. King WP, Kenny TW, Goodson KE, Cross GLW, Despont M, Durig UT, Rothuizen H, Binnig G, Vettiger P (2002) Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation. J Microelectromech Syst 11:765–774

    Article  Google Scholar 

  44. Yasumura KY, Stowe TD, Chow EM, Pfafman T, Kenny TW, Stipe BC, Rugar D (2000) Quality factor in micron- and submicron-thick cantilevers. J MEMS 9:117–125

    Article  Google Scholar 

  45. Polytec, Inc. (2006) Principles of laser Doppler vibrometry. http://www.polytec.com/usa/158_192.asp. Accessed 11/2006

  46. Dändliker R, Thalmann R (1985) Heterodyne and quasi-heterodyne holographic interferometry. Opt Eng 25:824–831

    Google Scholar 

  47. Klempner AR (2006) Development of a modular interferometric microscopy system for characterization of MEMS, MS Thesis, Worcester Polytechnic Institute, Worcester, MA, pp 68–98

  48. Marinis RT (2009) Development and implementation of automated interferometric microscope system for study of MEMS inertial sensors, Ph.D. Dissertation, Worcester Polytechnic Institute, Worcester, MA

  49. Choi DH, Kim HG, Nix WD (2004) Anelasticity and damping of thin aluminum films on silicon substrates. J Microelectromech Syst 13:230–237

    Article  Google Scholar 

  50. Sandberg R, Mølhave K, Boisen A, Svendsen W (2005) Effect of gold coating on the Q-factor of a resonant cantilever. J Micromech Microeng 15:2249–2253

    Article  Google Scholar 

Download references

Acknowledgments

This study was supported by the NEST program at WPI-ME/CHSLT. The author gratefully acknowledges permissions by sponsors to present results of their projects and thanks for contributions to the developments presented in this paper by the members of the CHSLT.

Author information

Authors and Affiliations

  1. NEST – NanoEngineering, Science, and Technology, CHSLT – Center for Holographic Studies and Laser micro-mechaTronics, Department of Mechanical Engineering, School of Engineering, Worcester Polytechnic Institute, 100 Institute Rd., Worcester, MA, 01609, USA

    R. J. Pryputniewicz

Authors
  1. R. J. Pryputniewicz
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to R. J. Pryputniewicz.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Pryputniewicz, R.J. Effect of Thin Films on Dynamic Performance of Resonating MEMS. Exp Mech 54, 25–33 (2014). https://doi.org/10.1007/s11340-013-9809-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11340-013-9809-3

Keywords

Search

Navigation