Skip to main content
SpringerLink
Log in

Measuring the Elastic Properties of Freestanding Thick Films Using a Nanoindenter-Based Bending Test

  • Published:
Experimental Mechanics Aims and scope Submit manuscript

Abstract

Films with thickness ranging from 10 to 100 μm are increasingly being used as the structural components of microelectromechanical systems (MEMS). Measuring the mechanical properties of these thick films is essential for enabling the design of MEMS with high performance and sufficient reliability. In this paper, we present a simple and convenient method for measuring the elastic modulus of thick films by loading a clamped circular film using a spherical tip. The test is implemented using a commercial nanoindenter so that the load and displacement can be measured with resolution of micronewtons and nanometers, respectively. Robust protocols have been developed for implementing the test within the constraints imposed by the nanoindenter. A crucial component of these protocols is a method for selecting loads to ensure deformation in the elastic bending regime and to minimize the relative contribution of contact indentation. The accuracy and utility of the nanoindenter-based bending test are discussed using measurements on thick films of aluminum and a standard epoxy.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8

Similar content being viewed by others

References

  1. Senturia SD (2000) Microsystem design. Kluwer Academic Publishers, Boston

    Google Scholar 

  2. Spearing SM (2000) Materials issues in microelectromechanical systems (MEMS). Acta Mater 48:179–196

    Article  Google Scholar 

  3. Freund LB, Suresh S (2003) Thin film materials. Cambridge University Press, Cambridge

    Google Scholar 

  4. Srikar VT, Spearing SM (2003) A critical review of microscale mechanical testing methods used in the design of microelectromechanical systems. Exp Mech 43:238–247

    Article  Google Scholar 

  5. Haque MA, Saif MTA (2003) A review of MEMS-based microscale and nanoscale tensile and bending testing. Exp Mech 43:248–255

    Article  Google Scholar 

  6. Sharpe WN (2002) Mechanical properties of MEMS materials. In: The MEMS Handbook, CRC Press, London

  7. Lang JH (2009) Multi-wafer rotating MEMS machines. Springer, New York

    Google Scholar 

  8. Ashrafi B, Hubert P, Vengallatore S (2006) Carbon nanotube-reinforced composites as structural materials for microactuators in microelectromechanical systems. Nanotechnology 17:4895–4903

    Article  Google Scholar 

  9. Srikar VT, Spearing SM (2003) Materials selection in micromechanical design: an application of the Ashby approach. J Microelectromech Syst 12:3–10

    Article  Google Scholar 

  10. Ajayan PM, Schadler LS, Braun PV (2003) Nanocomposite science and technology. Wiley, New York

    Book  Google Scholar 

  11. Prasad KE, Das B, Maitra U, Ramamurty U, Rao CNR (2009) Extraordinary synergy in the mechanical properties of polymer matrix composites reinforced with two nanocarbons. Proc Natl Acad Sci 106:13186–13189

    Article  Google Scholar 

  12. Komaragiri U, Begley MR, Simmonds JG (2005) The mechanical response of freestanding circular elastic films under point and pressure loads. J Appl Mech 72:203–212

    Article  MATH  Google Scholar 

  13. Scott ON, Begley MR, Komaragiri U, Mackin TJ (2004) Indentation of freestanding circular elastomer films using spherical indenters. Acta Mater 52:4877–4885

    Article  Google Scholar 

  14. Begley MR, Mackin TJ (2004) Spherical indentation of freestanding circular thin films in the membrane regime. J Mech Phys Solids 52:2005–2023

    Article  Google Scholar 

  15. Sormana JL, Chattopadhyay S, Meredith JC (2005) High-throughput mechanical characterization of freestanding polymer films. Rev Sci Instrum 76: art. no. 062214

    Google Scholar 

  16. Ju BF, Ju Y, Saka M, Liu KK, Wan KT (2005) A systematic method for characterizing the elastic properties and adhesion of a thin polymer membrane. Int J Mech Sci 47:319–332

    Article  Google Scholar 

  17. Zhang R, Shilo D, Ravichandran G, Bhattacharya K (2006) Mechanical characterization of released thin films by contact loading. J Appl Mech 73:730–736

    Article  MATH  Google Scholar 

  18. Herbert EG, Oliver WC, de Boer MP, Pharr GM (2009) Measuring the elastic modulus and residual stress of freestanding thin films using nanoindentation techniques. J Mater Res 24:2974–2985

    Article  Google Scholar 

  19. Zhang TY, Su YJ, Qian CF, Zhao MH, Chen LQ (2000) Microbridge testing of silicon nitride thin films deposited on silicon wafers. Acta Mater 48:2843–2857

    Article  Google Scholar 

  20. Wang TH, Fang TH, Kang SH, Lin YC (2007) Nanoindentation characteristics of clamped freestanding Cu membranes. Nanotechnology 18: art. No. 135701

  21. Poilane C, Delobelle P, Lexcellent C, Hayashi S, Tobushi H (2000) Analysis of the mechanical behavior of shape memory polymer membranes by nanoindentation, bulging and point membrane deflection tests. Thin Solid Films 379:156–165

    Article  Google Scholar 

  22. Prorok BC, Espinosa HD (2002) Effects of nanometer-thick passivation layers on the mechanical response of thin gold films. J Nanosci Nanotechnol 2:427–433

    Article  Google Scholar 

  23. Espinosa HD, Prorok BC, Fischer M (2003) A methodology for determining mechanical properties of freestanding thin films and MEMS materials. J Mech Phys Solids 51:47–67

    Article  Google Scholar 

  24. Vlassak J, Nix WD (1992) A new bulge test technique for the determination of Young’s modulus and Poisson’s ratio of thin films. J Mater Res 7:3242–3249

    Article  Google Scholar 

  25. Ashrafi B, Pronovost R, Vengallatore S, Hubert P (2008) Elastic characterization of SWNT-reinforced polymer thin films using a nanoindenter-based bending test. In: Proc. 49th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference, 7–10 April, 2008, Schaumburg, IL, USA

  26. Hubert P, Ashrafi B, Adhikari K, Meredith J, Vengallatore S, Guan J, Simard B (2009) Synthesis and characterization of carbon nanotube-reinforced epoxy: correlation between viscosity and elastic modulus. Compos Sci Technol 69:2274–2280

    Article  Google Scholar 

  27. Das K, Park C, Le Faive R, Hubert P, Vengallatore S (2010) Synthesis and characterization of nanocomposite thin films for MEMS applications. Mater Res Soc Symp Proc 1222:99–104

    Google Scholar 

  28. Timoshenko S, Woinowsky-Krieger S (1959) Theory of plates and shells. McGraw-Hill, New York

    Google Scholar 

  29. Johnson KL (1987) Contact mechanics. Cambridge University Press, Cambridge

    Google Scholar 

  30. Ashby MF (2005) Materials selection in mechanical design. Elsevier Butterworth-Heinemann, New York

    Google Scholar 

  31. Walter C, Antretter T, Daniel R, Mitterer C (2007) Finite element simulation of the effect of surface roughness on nanoindentation of thin films with spherical indenters. Surf Coat Technol 202:1103–1107

    Article  Google Scholar 

Download references

Acknowledgements

Financial support from the Natural Sciences and Engineering Research Council (NSERC) and the Canada Research Chairs program is gratefully acknowledged.

Author information

Authors and Affiliations

  1. Department of Mechanical Engineering, McGill University, 817 Sherbrooke Street West, Montreal, QC, Canada

    B. Ashrafi, K. Das, R. Le Faive, P. Hubert & S. Vengallatore

Authors
  1. B. Ashrafi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. K. Das
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. R. Le Faive
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. P. Hubert
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. S. Vengallatore
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to S. Vengallatore.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ashrafi, B., Das, K., Le Faive, R. et al. Measuring the Elastic Properties of Freestanding Thick Films Using a Nanoindenter-Based Bending Test. Exp Mech 52, 371–378 (2012). https://doi.org/10.1007/s11340-011-9494-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11340-011-9494-z

Keywords

Search

Navigation