Tribology Letters

, Volume 49, Issue 1, pp 169–178 | Cite as

Self-lubricating SU-8 Nanocomposites for Microelectromechanical Systems Applications

  • Prabakaran Saravanan
  • Nalam Satyanarayana
  • Sujeet K. Sinha
Original Paper

Abstract

SU-8 is an industrially useful photoresist polymer for micro-fabrication because of its unique UV-sensitive curing property. It is also used as a structural material for micro-machines such as micro-electro mechanical systems (MEMS). However, it has poor tribological and mechanical properties which make SU-8 inferior to Si, the mainstay MEMS material today. In this paper, we report the fabrication of SU-8 nanocomposites which are self-lubricating and have better mechanical properties. The liquid lubricant i.e., perfluoropolyether (PFPE) and nanoparticles such as SiO2, CNTs, and graphite were added into SU-8 for this purpose. These self-lubricating SU-8 + PFPE and SU-8 + PFPE + nanoparticle composites have shown a reduction in the initial coefficient of friction by ~6–9 times and increased wear life by more than four orders of magnitude. The mechanical properties such as the elastic modulus and the hardness have increased by ~1.4 times. These SU-8 nanocomposites can be used as a self-lubricating structural material for MEMS applications requiring no external lubrication. As well, these nanocomposites can find applications in many tribological components of traditional machines.

Keywords

Lubrication Polymer Self-lubrication MEMS 

References

  1. 1.
    Marinis, T.F.: The future of microelectromechanical systems (MEMS). Strain 45, 208–220 (2009)CrossRefGoogle Scholar
  2. 2.
    Kim, S.H., Asay, D.B., Dugger, M.T.: Nanotribology and MEMS. NanoToday 2, 22–29 (2007)Google Scholar
  3. 3.
    de Boer, M.P., Mayer, T.M.: Tribology of MEMS. MRS Bull. 4, 302–304 (2001)CrossRefGoogle Scholar
  4. 4.
    Lee, K.K., Bhushan, B., Hansford, D.: Nanotribological characterization of fluoropolymer thin films for biomedical micro/nanoelectromechanical system applications. J. Vac. Sci. Technol. A 23, 804–810 (2005)CrossRefGoogle Scholar
  5. 5.
    Gelorme, J.D., Cox, R.J., Gutierrez, S.A.R.: Photoresist composition and printed circuit boards and packages made herewith. US Patent 4,882,245, 21 Nov 1989Google Scholar
  6. 6.
    Abgrall, P., Conedera, V., Camon, H., Gue, A.-M., Nguyen, N.T.: SU-8 as a structural material for labs-on-chips and microelectromechanical systems. Electrophoresis 28, 4539–4551 (2007)CrossRefGoogle Scholar
  7. 7.
    Asay, D.B., Dugger, M.T., Ohlhausen, J.A., Kim, S.H.: Macro- to nanoscale wear prevention via molecular adsorption. Langmuir 24, 155–159 (2008)CrossRefGoogle Scholar
  8. 8.
    Asay, D.B., Dugger, M.T., Kim, S.H.: In situ vapor-phase lubrication of MEMS. Tribol. Lett. 29, 67–74 (2008)CrossRefGoogle Scholar
  9. 9.
    Eapen, K.C., Patton, S.T., Smallwood, S.A., Philips, B.S., Zabinski, J.S.: MEMS lubricants based on bound and mobile phases of hydrocarbon compounds: film deposition and performance evaluation. J. Microelectromech. Syst. 14, 954–960 (2005)CrossRefGoogle Scholar
  10. 10.
    Henck, S.A.: Lubrication of digital micromirror devices™. Tribol. Lett. 3, 239–247 (1997)CrossRefGoogle Scholar
  11. 11.
    Knieling, T., Lang, W., Benecke, W.: Gas phase hydrophobisation of MEMS silicon structures with self-assembling monolayers for avoiding in-use sticking. Sens. Actuators B 126, 13–17 (2007)CrossRefGoogle Scholar
  12. 12.
    Ma, J.Q., Pang, C.J., Mo, Y.F., Bai, M.W.: Preparation and tribological properties of multiply-alkylated cyclopentane (MAC)-octadecyltrichlorosilane (OTS) double-layer film on silicon. Wear 263, 1000–1007 (2007)CrossRefGoogle Scholar
  13. 13.
    Patton, S.T., Eapen, K.C., Zabinski, J.S., Sanders, J.H., Voevodin, A.A.: Lubrication of microelectromechanical systems radio frequency switch contacts using self-assembled monolayers. J. Appl. Phys. 102, 024903 (2007)CrossRefGoogle Scholar
  14. 14.
    Patton, S.T., Slocik, J.M., Campbell, A., Hu, J., Naik, R.R., Voevodin, A.A.: Bimetallic nanoparticles for surface modification and lubrication of MEMS switch contacts. Nanotechnology 19, 405705 (2008)CrossRefGoogle Scholar
  15. 15.
    Prasad, S.V., Scharf, T.W., Kotula, P.G., Michael, J.R., Christenson, T.R.: Application of diamond-like nanocomposite tribological coatings on LIGA microsystem parts. J. Microelectromech. Syst. 18, 695–704 (2009)CrossRefGoogle Scholar
  16. 16.
    Satyanarayana, N., Sinha, S.K.: Tribology of PFPE overcoated self-assembled monolayers deposited on Si surface. J. Phys. D: Appl. Phys. 38, 3512–3522 (2005)CrossRefGoogle Scholar
  17. 17.
    Satyanarayana, N., Sinha, S.K., Lim, S.-C.: Highly wear resistant chemisorbed polar ultra-high-molecular-weight polyethylene thin film on Si surface for micro-system applications. J. Mater. Res. 24, 3331–3337 (2009)CrossRefGoogle Scholar
  18. 18.
    Scharf, T.W., Prasad, S.V., Dugger, M.T., Kotula, P.G., Goeke, R.S., Grubbs, R.K.: Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS. Acta Mater. 54, 4731–4743 (2006)CrossRefGoogle Scholar
  19. 19.
    Sidorenko, A., Ahn, H.-S., Kim, D.-I., Yang, H., Tsukruk, V.V.: Wear stability of polymer nanocomposite coatings with trilayer architecture. Wear 252, 946–955 (2002)CrossRefGoogle Scholar
  20. 20.
    Jiguet, S., Judelewicz, M., Mischler, S., Hofmann, H., Bertsch, A., Renaud, P.: SU-8 nanocomposite coatings with improved tribological performance for MEMS. Surf. Coat. Technol. 201, 2289–2295 (2006)CrossRefGoogle Scholar
  21. 21.
    Jiguet, S., Judelewicz, M., Mischler, S., Bertch, A., Renaud, P.: Effect of filler behavior on nanocomposite SU8 photoresist for moving micro-parts. Microelectron. Eng. 83, 1273–1276 (2006)CrossRefGoogle Scholar
  22. 22.
    Singh, R.A., Satyanarayana, N., Kustandi, T.S., Sinha, S.K.: Tribo-functionalizing Si and SU8 materials by surface modification for application in MEMS/NEMS actuator-based devices. J. Phys. D: Appl. Phys. 44, 015301 (2011)CrossRefGoogle Scholar
  23. 23.
    Singh, R.A., Satyanarayana, N., Sinha, S.K.: Surface chemical modification for exceptional wear life of MEMS materials. AIP Adv. 1, 042141 (2011)CrossRefGoogle Scholar
  24. 24.
    Voigt, A., Heinrich, M., Martin, C., Liobera, A., Gruetzner, G., Perez-Murano, F.: Improved properties of epoxy nanocomposites for specific applications in the field of MEMS/NEMS. Microelectron. Eng. 84, 1075–1079 (2007)CrossRefGoogle Scholar
  25. 25.
    Chiamori, H.C., Brown, J.W., Adhiprakasha, E.V., Hantsoo, E.T., Straalsund, J.B., Melosh, N.A., Pruitt, B.L.: Suspension of nanoparticles in SU-8: processing and characterization of nanocomposite polymers. Microelectron. J. 39, 228–236 (2008)CrossRefGoogle Scholar
  26. 26.
    Mionic, M., Jiguat, S., Judelewicz, M., Karimi, A., Forro, L., Magrez, A.: Study of the mechanical response of carbon nanotubes-SU8 composites by nanoindentation. Phys. Status Solidi B 247, 3072–3075 (2010)CrossRefGoogle Scholar
  27. 27.
    Okhlopkova, A.A., Pertrova, P.N., Popov, S.N., Fedorov, A.L.: Tribological materials based on polytetrafluoroethylene modified by a liquid lubricant. J. Frict. Wear 29, 133–136 (2008)CrossRefGoogle Scholar
  28. 28.
    Puukilainen, E., Saarenpää, H., Pakkanen, T.A.: Compression-molded, lubricant-treated UHMWPE composites. J. Appl. Polym. Sci. 104, 1762–1768 (2007)CrossRefGoogle Scholar
  29. 29.
    Guo, Q.B., Lau, K.T., Zheng, B.F., Rong, M.Z., Zhang, M.Q.: Imparting ultra-low friction and wear rate to epoxy by the incorporation of microencapsulated lubricant? Macromol. Mater. Eng. 294, 20–24 (2009)CrossRefGoogle Scholar
  30. 30.
    Hu, T., Zhang, Y., Hu, L.: Tribological investigation of MoS2 coatings deposited on the laser textured surface. Wear 278–279, 77–82 (2012)CrossRefGoogle Scholar
  31. 31.
    Neidhardt, J., Hultman, L., Broitman, E., Scharf, T.W., Singer, I.L.: Structural, mechanical and tribological behavior of fullerene-like and amorphous carbon nitride coatings. Diam. Relat. Mater. 13, 1882–1888 (2004)CrossRefGoogle Scholar
  32. 32.
    Sugimoto, I., Miyake, S.: Solid lubricating fluorine-containing polymer film synthesized by perfluoropolyether sputtering. Thin Solid Films 158, 51–60 (1988)CrossRefGoogle Scholar
  33. 33.
    Constantin, F., Fenouillot, F., Pascault, J.-.P., Williams, R.J.J.: Post-crosslinkable blends: reactions between a linear poly(hydroxyl-amino ether) and a diepoxy. Macromol. Mater. Eng. 289, 1027–1032 (2004)CrossRefGoogle Scholar
  34. 34.
    Surface Coatings Association of Australia. (ed.) Surface Coatings: Raw Materials and Their Usage, vol. 1. Chapman & Hall, London (1993). ISBN 0412552108 Google Scholar

Copyright information

© Springer Science+Business Media New York 2012

Authors and Affiliations

  • Prabakaran Saravanan
    • 1
  • Nalam Satyanarayana
    • 1
  • Sujeet K. Sinha
    • 1
  1. 1.Department of Mechanical EngineeringNational University of SingaporeSingaporeSingapore

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