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Friction and Wear Characteristics of C/Si Bi-layer Coatings Deposited on Silicon Substrate by DC Magnetron Sputtering

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Abstract

The tribological behavior of carbon/silicon bi-layer coatings deposited on a silicon substrate by DC magnetron sputtering was assessed and compared to that of amorphous carbon and silicon coatings. The motivation was to develop a wear resistant coating for silicon using thin layers of amorphous carbon and silicon. Wear tests were conducted by sliding a stainless steel ball against the coating specimens under applied normal loads in the range of 20 ~ 50 mN. Results showed that the wear rate of the bi-layer coating was strongly dependent on the ratio of thickness between the carbon and silicon layers. The wear rate of the bi-layer coating with 25 nm thick carbon and 102 nm thick silicon layers was about 48 and 20 times lower than that of the single-layer amorphous carbon and amorphous silicon coating, respectively. In addition, the steady-state friction coefficient of the bi-layer coating could be decreased to 0.09 by optimizing the thickness of the layer. Finally, a model for the wear reduction mechanism of the carbon/silicon bi-layer coating was proposed.

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Acknowledgments

This work was supported by a National Research Foundation of Korea (NRF) grant funded by the Korean government (MEST) (No. 2012-0001232).

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Authors and Affiliations

  1. Center for Nano-Wear, Yonsei University, Seoul, 120-749, Korea

    Oleksiy V. Penkov, Auezhan Amanov & Dae-Eun Kim

  2. National Technical University “KhPI”, Kharkov, Ukraine

    Yegor A. Bugayev, Igor Zhuravel & Valeriy V. Kondratenko

  3. Department of Mechanical Engineering, Yonsei University, Seoul, 120-749, Korea

    Dae-Eun Kim

Authors
  1. Oleksiy V. Penkov
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  2. Yegor A. Bugayev
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  3. Igor Zhuravel
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  4. Valeriy V. Kondratenko
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  5. Auezhan Amanov
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  6. Dae-Eun Kim
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Correspondence to Dae-Eun Kim.

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Penkov, O.V., Bugayev, Y.A., Zhuravel, I. et al. Friction and Wear Characteristics of C/Si Bi-layer Coatings Deposited on Silicon Substrate by DC Magnetron Sputtering. Tribol Lett 48, 123–131 (2012). https://doi.org/10.1007/s11249-012-0008-7

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  • DOI: https://doi.org/10.1007/s11249-012-0008-7

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