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Tribological Behavior of Hard W/NbN Superlattice Films

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Abstract

Epitaxial W/NbN superlattice films with different modulation periods were deposited by reactive dc magnetron sputtering. The mechanical properties were measured by nanoindentation and ball-on-disk tribometry, worn surface of the films were investigated by atomic force microscopy, scanning electron microscopy, and optical profiler. The superlattice films with a modulation period of 5.6 and 10.4 nm provide superhardness of 42.2 ± 1.6 and 40.4 ± 3.1 GPa, respectively, much higher than the constituent NbN and W monolayers. However, dry rubbing tests of both W/NbN superlattice films exhibit the wear rate higher than that of the NbN film. It is suggested that for superlattice films, hard NbN bilayer flakes off during the wear process due to weak interface bonding and different deformability between the bilayer constitutions. Sharp interface, as well as differences in deformability and wear property of the bilayer constituents is responsible for the wear deterioration of epitaxial W/NbN superlattice films.

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Acknowledgment

This work is supported by the National Natural Science Foundation of China (No. 50871102).

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Authors and Affiliations

  1. Department of Materials Science and Engineering, State Key Laboratory of Silicon Materials, Zhejiang University, Hangzhou, 310027, China

    C. F. Hong, J. P. Tu, R. L. Li, D. G. Liu & S. X. Mao

  2. Department of Mechanical Engineering and Materials Science, University of Pittsburgh, Pittsburgh, PA, 15261, USA

    S. X. Mao

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  1. C. F. Hong
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  2. J. P. Tu
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  3. R. L. Li
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  4. D. G. Liu
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Correspondence to J. P. Tu.

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Hong, C.F., Tu, J.P., Li, R.L. et al. Tribological Behavior of Hard W/NbN Superlattice Films. Tribol Lett 38, 225–229 (2010). https://doi.org/10.1007/s11249-010-9596-2

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  • DOI: https://doi.org/10.1007/s11249-010-9596-2

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