Tribology Letters

, 36:233 | Cite as

Characterization of Microscale Wear in a Polysilicon-Based MEMS Device Using AFM and PEEM–NEXAFS Spectromicroscopy

  • D. S. Grierson
  • A. R. Konicek
  • G. E. Wabiszewski
  • A. V. Sumant
  • M. P. de Boer
  • A. D. Corwin
  • R. W. Carpick
Original Paper

Abstract

Mechanisms of microscale wear in silicon-based microelectromechanical systems (MEMS) are elucidated by studying a polysilicon nanotractor, a device specifically designed to conduct friction and wear tests under controlled conditions. Photoelectron emission microscopy (PEEM) was combined with near-edge X-ray absorption fine structure (NEXAFS) spectroscopy and atomic force microscopy (AFM) to quantitatively probe chemical changes and structural modification, respectively, in the wear track of the nanotractor. The ability of PEEM–NEXAFS to spatially map chemical variations in the near-surface region of samples at high lateral spatial resolution is unparalleled and therefore ideally suited for this study. The results show that it is possible to detect microscopic chemical changes using PEEM–NEXAFS, specifically, oxidation at the sliding interface of a MEMS device. We observe that wear induces oxidation of the polysilicon at the immediate contact interface, and the spectra are consistent with those from amorphous SiO2. The oxidation is correlated with gouging and debris build-up in the wear track, as measured by AFM and scanning electron microscopy (SEM).

Keywords

Microscale wear Microelectromechanical systems (MEMS) Nanotractor Photoelectron emission microscopy (PEEM) Atomic force microscopy (AFM) 

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Copyright information

© Springer Science+Business Media, LLC 2009

Authors and Affiliations

  • D. S. Grierson
    • 1
  • A. R. Konicek
    • 2
  • G. E. Wabiszewski
    • 3
  • A. V. Sumant
    • 4
  • M. P. de Boer
    • 5
  • A. D. Corwin
    • 6
  • R. W. Carpick
    • 3
  1. 1.Department of Mechanical EngineeringUniversity of Wisconsin-MadisonMadisonUSA
  2. 2.Department of Physics and AstronomyUniversity of PennsylvaniaPhiladelphiaUSA
  3. 3.Department of Mechanical Engineering and Applied MechanicsUniversity of PennsylvaniaPhiladelphiaUSA
  4. 4.Center for Nanoscale Materials, Argonne National LaboratoriesArgonneUSA
  5. 5.MEMS Devices and Reliability Physics DepartmentSandia National LaboratoriesAlbuquerqueUSA
  6. 6.MEMS Science and Technology DepartmentSandia National LaboratoriesAlbuquerqueUSA

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