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Improvement of Local Surface Quality by Using Single Abrasive Abrasion Process

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Abstract

AFM-based wear process actually is single abrasive abrasion process. It is widely employed in the surface micro/nano machining for fabrication of structures at the nanometer scale exhibiting high removing ability of nanometer scale materials. In this study, application of AFM-based single abrasive abrasion process in the local surface quality (surface roughness) improvement was studied. Merged holes were fabricated using an AFM diamond tip with different wear parameters on the surface of germanium (Ge) machined by conventional ultra-precision diamond turning. Results showed that cracks left by diamond turning can be removed and the local surface quality can be improved. Also effects of the wear parameters on the surface roughness were investigated. The optimized parameters of the abrasion process for improving the surface quality were provided. It is verified that AFM-based single abrasive abrasion process is a novel approach to modify or repair local surface on the surface of parts manufactured by other methods.

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References

  1. Fang, T.H., Chang, J.: Effects of AFM-based nanomachining process on aluminum surface. J. Phys. Chem. Solids 64, 913–918 (2003)

    Article  CAS  Google Scholar 

  2. Fang, T.H., Weng, C.I., Chang, J.G.: Machining characterization of the nano-lithography process using atomic force microscopy. Nanotechnology 11, 181–187 (2000)

    Article  Google Scholar 

  3. Jiang Z.G., Lu C.J., Bogy D.B., et al.: An investigation of the experimental conditions and characteristics of a nano-wear test. Wear 181–183, 777–783 (1995)

    Google Scholar 

  4. Sumomogi, T., Endo, T., Kuwahara, K.: Micromachining of metal surface by scanning probe microscope. J. Vac. Sci. Technol. B12(3), 1876–1880 (1994)

    Google Scholar 

  5. Sumomogi, T., Endo, T., Kuwahara, K.: Nanoscale layer removal of metal surfaces by scanning probes microscope scratching. J. Vac. Sci. Technol. B. B13(3), 1257–1260 (1995)

    Article  Google Scholar 

  6. Headrick, J.E., Armstrong, M., Cratty, J., et al.: Nanoscale patterning of alkyl monolayers on silicon using the atomic force microscope. Langmuir 21, 4117–4122 (2005)

    Article  CAS  Google Scholar 

  7. Blach, J.A., Watson, G.S., Brown, C.L., et al.: A mechanistic approach to tip-induced nano-lithography of polymer surfaces. Thin solid films 459, 95–99 (2004)

    Article  CAS  Google Scholar 

  8. Koinkar, V.N., Bhushan, B.: Scanning and transmission electron microscopies of single-crystal silicon microworn/machined using atomic force microscopy. J. Mater. Resour. 12, 3219–3224 (1997)

    Article  CAS  Google Scholar 

  9. Ichida, Y., Morimoto, Y., Sato, R., et al.: Nanomachining on Si (100) surfaces using an atomic force microscope with lateral force transducer. Proceedings of the 2003 nanotechnology conference, San Francisco/USA, 534–537 (2003)

  10. Lee, J.M., Sung, I.H., Kim, D.E.: Process development of precision surface micro-machining using mechanical abrasion and chemical etching. Microsys. Technol. 8, 419–426 (2003)

    Article  Google Scholar 

  11. Notargiacomo, A., Giovine, E., Evangelisti, F., et al.: EBL and AFM-based techniques for nanowires fabrication on Si/SiGe. Mater. Sci. Eng. 19, 185–188 (2002)

    Article  Google Scholar 

  12. Tegen, S., Kracke, B., Damaschke, B.: Surface modifications with a scanning force microscope. Rev. Sci. Instrum. 68(3), 1458–1460 (1997)

    Article  CAS  Google Scholar 

  13. Notargiacomo, A., Foglietti, V., Cianci, E., et al.: Atomic force microscopy lithography as a nanodevice development technique. Nanotechnology 10, 458–463 (1999)

    Article  CAS  Google Scholar 

  14. Schumacher, H. W., Keyser, U.F., Zeitler, U., et al.: Controlled mechanical AFM machining of two-dimensional electron systems: fabrication of a single-electron transistor. Physica E 6, 860–863 (2000)

    Article  CAS  Google Scholar 

  15. Gobel, H., Von, B., Enhagen, D.: Atomic force microscope as a tool for metal surface modifications. J. Vac. Sci. Technol. B13(3), 1247–1249 (1995)

    Google Scholar 

  16. Hokkirigawa, K., Kato, K.: An experimental and theoretical investigation of ploughing, cutting and wedge formation during abrasive wear. Tribol. Int. 21, 51–57 (1988)

    Article  CAS  Google Scholar 

  17. Zhang, L.Z., Tanaka, H.: Toward a deeper understanding of wear and friction on the atomic scale- a molecular dynamics analysis. Wear 211, 44–53 (1997)

    Article  CAS  Google Scholar 

  18. Sun T., Yan Y.D., Xia J.F., et al.: Research on micro machining using afm diamond tip. Key Eng. Mater. 259–260, 577–581 (2004)

    Article  Google Scholar 

Download references

Acknowledgments

The authors gratefully acknowledge both the National Natural Science Foundation of China (50605012 and 50575058) and the Foundation for Youth of Heilongjiang (QC05C11) for their financial supports of this work.

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  1. Department of Mechanical Engineering, Harbin Institute of Technology, P.O. Box 413, Harbin, 150001, China

    Yongda Yan, Tao Sun & Shen Dong

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  1. Yongda Yan
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  2. Tao Sun
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  3. Shen Dong
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Correspondence to Yongda Yan.

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Yan, Y., Sun, T. & Dong, S. Improvement of Local Surface Quality by Using Single Abrasive Abrasion Process. Tribol Lett 28, 157–162 (2007). https://doi.org/10.1007/s11249-007-9260-7

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  • DOI: https://doi.org/10.1007/s11249-007-9260-7

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