Abstract
Low temperature growth process of carbon nanotubes (CNTs) over bi-metallic (Co–Fe) and tri-metallic (Ni–Co–Fe) catalysts on Si/Al/Al2O3 substrates is carried out from acetylene precursor using hydrogen, ammonia or nitrogen as a carrier in a low pressure chemical vapor deposition system. Using the tri-metallic Ni–Co–Fe catalyst template, vertically aligned CNTs of ~700 nm length could be grown already at 450 °C within 10 min using ammonia as a carrier. Within the same period of time, on bi-metallic Co–Fe catalyst templates, ~250 nm long aligned nanotubes emerged already at 400 °C in nitrogen carrier. At low temperatures most of the catalyst materials were elevated from the support by the grown nanotubes indicating tip growth mechanism. The structure of catalyst layers and nanotube films was studied using scanning and transmission electron microscopy and atomic force microscopy.
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Bacsa W (2003) In: Bushan B (ed) Springer handbook of nanotechnology, chap. 3, vol. 2. Springer, Berlin
Kordas K, Toth G, Moilanen P, Kumpumaki M, Vahakangas J, Uusimaki A, Vajtai R, Ajayan PM (2007) Appl Phys Lett 90:123105
Wang T, Jeppson K, Ye L, Liu J (2011) Small 7:2313
Halonen N, Kordas K, Toth G, Mustonen T, Maklin J, Vahakangas J, Ajayan PM, Vajtai R (2008) J Phys Chem C 112:6723
Jiang J, Feng T, Zhang JH, Cheng XH, Chao GB, Jiang BY, Wang YJ, Wang X, Liu XH, Zou SC (2006) Appl Surf Sci 252:2938
Jung YJ, Wei BQ, Vajtai R, Ajayan PM (2003) Nano Lett 3:561
Mata D, Silva RM, Fernandes AJS, Oliveira FJ, Costa PMFJ, Silva RF (2012) Carbon 50:3585
Mizuno K, Hata K, Saito T, Ohshima S, Yumura M, Iijima S (2005) J Phys Chem B 109:2632
Radhakrishnan JK, Pandian PS, Padaki VC, Bhusan H, Rao KUB, Xie J, Abraham JK, Varadan VK (2009) Appl Surf Sci 255:6325
Wei BQ, Vajtai R, Jung Y, Ward J, Zhang R, Ramanath G, Ajayan PM (2002) Nature 416:495
Zhan ZY, Zhang YN, Sun GZ, Zheng LX, Liao K (2011) Appl Surf Sci 257:7704
Dubosc M, Casimirius S, Besland M-P, Cardinaud C, Granier A, Duvail J, Gohier A, Minéa T, Arnal V, Torres J (2007) Microelectron Eng 84:2501
Hofmann S, Ducati C, Robertson J, Kleinsorge B (2003) Appl Phys Lett 83:135
Hofmann S, Kleinsorge B, Ducati C, Ferrari A, Robertson J (2004) Diam Relat Mater 13:1171
Kang H, Yoon H, Kim C, Hong J, Han I, Cha S, Song B, Jung J, Lee N, Kim J (2001) Chem Phys Lett 349:196
Kyung S, Lee Y, Kim C, Lee J, Yeom G (2006) Carbon 44:1530
Shiratori Y, Hiraoka H, Takeuchi Y, Itoh S, Yamamoto M (2003) Appl Phys Lett 82:2485
Show Y (2011) Diam Relat Mater 20:1081
Srivastava SK, Vankar VD, Kumar V (2008) Nanoscale Res Lett 3:25
Wang H, Moore JJ (2012) Carbon 50:1235
Nessim GD, Seita M, Plata DL, O’Brien KP, Hart AJ, Meshot ER, Reddy CM, Gschwend PM, Thompson CV (2011) Carbon 49:804
Wang X, Zhang Y, Haque MS, Teo KBK, Mann M, Unalan HE, Warburton PA, Udrea F, Milne WI (2012) IEEE Trans Nanotechnol 11:215
Cantoro M, Hofmann S, Pisana S, Scardaci V, Parvez A, Ducati C, Ferrari A, Blackburn A, Wang K, Robertson J (2006) Nano Lett 6:1107
Tsai T, Tai N, Chen KC, Lee SH, Chan LH, Chang YY (2009) Diam Relat Mater 18:307
Halonen N, Sapi A, Nagy L, Puskas R, Leino AR, Maklin J, Kukkola J, Toth G, Wu MC, Liao HC, Su WF, Shchukarev A, Mikkola JP, Kukovecz A, Konya Z, Kordas K (2011) Phys Stat Sol B 248:2500
Terrado E, Tacchini I, Benito AM, Maser WK, Martínez MT (2009) Carbon 47:1989
Lee S, Chang Y, Lee L (2008) N Carbon Mater 23:302
Mattevi C, Tobias Wirth C, Hofmann S, Blume R, Cantoro M, Ducati C, Cepek C, Knop-Gericke A, Milne S, Castellarin-Cudia C, Dolafi S, Goldoni A, Schloegl R, Robertson J (2008) J Phys Chem C 112:12207
Azam MA, Fujiwara A, Shimoda T (2011) Appl Surf Sci 258:873
Zhang R, Amlani L, Baker J, Tresek J, Tsui R (2003) Nano Lett 3:731
Durán RP, Amorebieta VT, Colussi AJ (1988) J Phys Chem 92:636
Back MH (1971) Can J Chem 49:2199
Tanzawa T, Gardiner W (1980) J Phys Chem 84:236
Ajayan P (2004) Nature 427:426
Harris P (2007) Carbon 45:229
Wirth CT, Hofmann S, Robertson J (2009) Diam Relat Mater 18:940
Hofmann S, Blume R, Wirth C, Cantoro M, Sharma R, Ducati C, Hävecker M, Zafeiratos S, Schnoerch P, Oestereich A, Teschner D, Albrecht M, Knop-Gericke A, Schlögl R, Robertson J (2009) J Phys Chem C 113:1648
Feng J, Zeng HC (2005) J Phys Chem B 109:17113
Juang ZY, Chien IP, Lai JF, Lai TS, Tsai CH (2004) Diam Relat Mater 13:1203
Choi KS, Cho YS, Hong SY, Park JB, Kim DJ (2001) J Eur Ceram Soc 21:2095
Lander JJ, Kern HE, Beach AL (1952) J Appl Phys 23:1305
Ishida K, Nishizawa T (1991) J Phase Equil 12:417
ASM Handbook Committee (1974) Metals handbook vol. 8: metallography, structures and phase diagrams. American Society for Metals, Metals Park
Atkins P, de Paula J (2006) Atkins’ physical chemistry, 8th edn. Oxford University Press, Oxford
Kittel C (1971) Introduction to solid state physics, 4th edn. Wiley, New York
Wu TM (2005) Carbon nanotube applications for CMOS back-end processing. Diploma Thesis, Massachusetts Institute of Technology
Chen GY, Jensen B, Stolojan V, Silva SRP (2011) Carbon 49:280
Acknowledgments
N.H., A.-R.L. and G.T are grateful for the support from the NGS-Nano, GETA and Academy of Finland, respectively. The work is financed by the projects Thema-CNT (EU FP7) and RoCaNaMe (Academy of Finland) programs.
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Pitkänen, O., Halonen, N., Leino, AR. et al. Low-Temperature Growth of Carbon Nanotubes on Bi- and Tri-metallic Catalyst Templates. Top Catal 56, 522–526 (2013). https://doi.org/10.1007/s11244-013-0047-9
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DOI: https://doi.org/10.1007/s11244-013-0047-9