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Synthesis of Supported Catalysts by Atomic Layer Deposition

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Abstract

A promising new method of catalyst synthesis is atomic layer deposition (ALD). ALD is a variation on chemical vapor deposition wherein metals, oxides and other materials are deposited on surfaces via a sequence (usually binary) of self-limiting reactions. The self-limiting character of the reactions makes it possible to achieve uniform deposits on high-surface-area porous solids and, hence, produce practical catalytic materials. The ability to deposit uniform layers in a sequence makes it possible to fabricate the support and then construct the catalytic metal and/or metal oxide species and add modifier layers in any desired order. This article will provide a short introduction to the technique of ALD and its application to the synthesis of supported catalytic metal nanoparticles and oxide monolayers.

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Acknowledgments

The work at Argonne National Laboratory was supported by the U.S. Department of Energy, BES-HFI, Chemical Sciences under Contract DE-AC-02-06CH11357. The work at Northwestern University was financially supported by The Dow Chemical Company under the Dow Methane Challenge Award.

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Correspondence to Peter C. Stair.

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Stair, P.C. Synthesis of Supported Catalysts by Atomic Layer Deposition. Top Catal 55, 93–98 (2012). https://doi.org/10.1007/s11244-012-9776-4

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