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The syntheses, characterization, thermal properties of asymmetrical La β-diketonate and their application as ALD precursor for La2O3 films

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Abstract

In this paper, three complexes La2(thd)6 (thd = 2,2,6,6-tetramethyl-3,5-heptanedione, 1), La2(tmod)6 (tmod = 2,2,6,6-tetramethyl octane-3, 5-dionates, 2) and La2(ibpm)6 (ibpm = 2,2,6-trimethyl-3, 5-heptane-dionates, 3) were synthesized by one-step method and characterized with 1H-NMR, 13C-NMR and X-ray single-crystal diffraction. The melting point and TGA data demonstrated that the asymmetry of the ligand and the number of flexible joints could improve the volatility of the complex. With the help of asymmetry and flexible joint, La2(tmod)6 was selected as ALD precursor to deposit La2O3 film on SiO2/Si (100) wafer. The self-limited deposition results demonstrated that La2(tmod)6 is better precursor than reported La2(thd)6 and La(thd)3-DMEA (DMEA = N,N-dimethylethylenediamine).

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  1. School of Chemical and Material Engineering, International Joint Research Center for Photoresponsive Molecules and Materials, Jiangnan University, Wuxi, 214122, People’s Republic of China

    Wenyong Zhao, Hong Zhou, Jiahao Li, Yuchen Lu & Yuqiang Ding

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HZ involved in preparation of crystal. WZ took part in investigation, writing–review and editing. JL involved in writing–original draft. YL and YD involved in editing and reviewing the manuscript.

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Correspondence to Yuqiang Ding.

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Zhao, W., Zhou, H., Li, J. et al. The syntheses, characterization, thermal properties of asymmetrical La β-diketonate and their application as ALD precursor for La2O3 films. Transit Met Chem (2024). https://doi.org/10.1007/s11243-024-00583-w

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