The structure, composition and mechanical properties of TiN/TiC multilayer coatings are investigated. All coatings were deposited on H13 hot work tool steel by the pulsed-DC plasma assisted chemical vapor deposition. Nanoindentation and nanoscratch tests were carried out by the atomic force microscopy. The objective is to determine mechanical properties such as hardness, elastic modulus, surface roughness and friction coefficient. The grazing incidence X-ray diffraction and the field emission scanning electron microscopy were also used to study the crystalline structure of coatings. Increasing the number of layers in coatings increased the elastic modulus and the hardness. Overall superior mechanical properties such as high hardness, the elastic modulus and the scratch resistance rendered to multilayer coatings with 10 layers. This type of coating can be suitable for wear resistance applications.
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References
H. Liepack, K. Bartsch, W. Brückner, A. Leonhardt, “Mechanical behavior of PACVD TiC–amorphous carbon composite layers,” Surf. Coat. Technol., 183, 69–73 (2004).
N. Kumar, R. Krishnan, D. Dinesh Kumar, et al., “Tribological properties of nanostructured TiC coatings deposited on steel and silicon substrates using pulse laser deposition technique,” Tribology – Mater. Surf. Interfaces, 5, 1–9 (2011).
A. Shanaghi, A. Sabour Rouhaghdam, S. Ahangarani, et al., “Effects of duty cycle on microstructure and corrosion behavior of TiC coatings prepared by DC pulsed plasma CVD,” Appl. Surf. Sci., 258, 3051–3057 (2012).
P. Panjan, M. Ekada, D. Kek-Merl, et al., “Deposition and characterization of Ti0.5Al0.5N/CrN multilayer coating sputtered at low temperature,” MTAEC9, 37 (3-4), 123–127 (2003).
J.-W. Lim, J.-J. Lee, H. Ahn, and K.-T. Rie, “Mechanical properties of TiN/TiB2 multilayers deposited by plasma enhanced chemical vapor deposition,” Surf. Coat. Technol., 174-175, 720–724 (2003).
D. Kim, Y. Cho, M. Lee, et al, “Properties of TiN–TiC coatings using plasma-assisted chemical vapor deposition,” Surf. Coat. Technol., 116-119, 906–910 (1999).
Y. Zhao, G. Lin, J. Xiao, et al., “TiN/TiC multilayer films deposited by pulse biased arc ion plating,” Vacuum, 85, 1–4 (2010).
A. Shanaghi, A. Sabour Rouhaghdam, S. Ahangarani, and P. K. Chu, “Effect of plasma CVD operating temperature on nanomechanical properties of TiC nano-structured coating investigated by atomic force microscopy,” Mater. Res. Bull., 47, 2200–2205 (2012).
H. L. Wang, J. L. He, and M. H. Hon, “Sliding wear resistance of TiCN coatings on tool steel made by plasma-enhanced chemical vapor deposition,” Wear, 169, 195–200 (1993).
Y. Iwai, T. Miyajima, A. Mizuno, et al., “Micro-slurry-jet erosion (MSE) testing of CVD TiC/TiN and TiC coatings,” Wear, 267, 264–269 (2009).
M. Takahashi and S. Shimada, “Preparation of composite and compositionally graded TiC–TiN films by liquid injection plasma-enhanced CVD,” Solid State Ionics, 172, 249–252 (2004).
S. Ma, Y. Li, and K. Xu, “The composite of nitrided steel of H13 and TiN coatings by plasma duplex treatment and the effect of pre-nitriding,” Surf. Coat. Technol., 137, 116–121 (2001).
K. Holmberg, A. Matthews, and H. Ronkainen, “Coatings tribology-contact mechanisms and surface design,” Tribol. Int., 31, 107–120 (1998).
A. Devia, V. Benavides, E. Restrepo, et al., “Influence substrate temperature on structural properties of TiN/TiC bilayers produced by pulsed arc techniques,” Vacuum, 81, 378–384 (2006).
D. E. Wolfe, J. Singh, and K. Narasimhan, “Synthesis and characterization of multilayered TiC/TiB2 coatings deposited by ion beam assisted, electron beam physical vapor deposition (EB-PVD),” Surf. Coat. Technol., 165, 8–25 (2003).
K. T. Rie, A. Gebauer, J. Wohle, et al., “Synthesis of TiN/TiCN/TiC layer systems on steel and cermet substrates by PACVD,” Surf. Coat. Technol., 74-75, 375–381 (1995).
C. Jarms, H. R. Stock, H. Berndt, et al., “Influence of the PACVD process parameters on the properties of titanium carbide thin films,” Surf. Coat.Technol., 98, 1547–1552 (1998).
Y. T. Pei, D. Galvan, J. Th. M. De Hosson, and C. Strondl, “Advanced TiC/a-C:H nanocomposite coatings deposited by magnetron sputtering,” J. Europ. Ceram. Soc., 26, 565–570 (2006).
C. Liu, K. Liu, H. Yan, et al., “Mechanical properties of TiN/NbN multilayered films prepared by PVD coating,” Adv. Ceram. Sci. Eng. (ACSE), 2, 16–22 (2013).
C. Morant, P. Prieto, A. Forn, et al., “Hardness enchancement by CN–TiCN–TiN multilayer films,” Surf. Coat. Technol., 180-181, 512–518 (2004).
S. H. Kim, Y. J. Baik, and D. Kwon, “Analysis of interfacial strengthening from composite hardness of TiN/VN and TiN/NbN multilayer hard coatings,” Surf. Coat. Technol., 187, 47–53 (2004).
K. H. T. Raman, M. S. R. N. Kiran, U. Ramamurty, and G. Mohan Rao, “Structure and mechanical properties of Ti–C films deposited using combination of pulsed DC and normal DC magnetron co-sputtering,” Appl. Surf. Sci., 258, 8629–8635 (2012).
W. C. Oliver and G. M. Phar, “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res., 7, 1564–1583 (1992).
S. H. Kim, H. Park, K. H. Lee, et al., “Structure and mechanical properties of titanium nitride thin films grown by reactive pulsed laser deposition,” Process. Res., 10, 49–53 (2009).
J. C. Caicedo, C. Amaya, L. Yate, et al., “TiCN/TiN/CN multilayer coatings with enhanced mechanical properties,” Appl. Surf. Sci., 256, 5898–5904 (2010).
K. Holmberg, H. Ronkainen, A. Laukkanen, et al., “Residual stresses in TiN, DLC and MoS2 coated surfaces with regard to their tribological fracture behavior,” Wear, 267, 2142–2156 (2009).
J. Ding, Y. Meng, and S. Wen, “Mechanical properties and fracture toughness of multilayer hard coatings using nanoindentation,” Thin Solid Films, 371, 178–182 (2000).
A. J. McGinnis, T. R. Watkins, and K. Jagannadham, “Residual stresses in a multilayer system of coatings,” Int. Centre Diffr. Data, 41, 443–454 (1999).
S. Jian, G. Chen, and T. Lin, “Berkovich nanoindentation on AlN thin films,” Nanoscale Res. Lett., 5, 935–940 (2010).
J. M. Lackner, L. Major, and M. Kot, “Microscale interpretation of tribological phenomena in Ti/TiN soft-hard multilayer coatings on soft austenite steel substrates,” Bull. Polish Acad. Sci. (Tech. Sci.), 59, 343–355 (2011).
Y. T. Pei, D. Galvan, J. Th. M. de Hosson, and A. Cavaleiro, “Nanostructured TiC/a-C coatings for low friction and wear resistant applications,” Surf. Coat. Technol., 198, 44–50 (2005).
L. Ipaz, A. Esguerra-Arce, W. Aperador, et al., “Nanofriction study using atomic force microscopy (AFM) of multilayers based in titanium, chromium and aluminum,” in: A. Mendez-Vilas (Ed.), Current Microscopy Contributions to Advances Science and Technology (2012), pp. 1395–1403.
D. G. Liu, J. P. Tu, C. D. Gu, et al., “Tribological and mechanical behaviors of TiN/CNx multilayer films deposited by magnetron sputtering,” Thin Solid Films, 519, 4842–4848 (2011).
A. A. C. Recco, C. C. Vifara, A. Sinator, and A. P. Tschiptschin, “Energy dissipation in depthsensing indentation as a characteristic of the nanoscratch behavior of coatings,” Wear, 267, 1146–1152 (2009).
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Translated from Problemy Prochnosti, No. 1, pp. 149 – 161, January – February, 2014.
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Azadi, M., Rouhaghdam, A.S. Nanomechanical Properties of TiN/TiC Multilayer Coatings. Strength Mater 46, 121–131 (2014). https://doi.org/10.1007/s11223-014-9523-0
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DOI: https://doi.org/10.1007/s11223-014-9523-0
Keywords
- TiN/TiC coatings
- plasma-assisted chemical vapor deposition
- atomic force microscopy
- nanoindentation
- nanoscratch