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Multimode Slot-Waveguide Sensor Using TE/TM Polarizations for Enhanced Sensitivity

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Abstract

The propagating modes of conventional rib and channel waveguides utilized in Multimode Interference sensors have a capacity for interaction with the sample material limited to the size and intensity of the evanescent tail of the modes, which leads to a limitation in device sensitivity. Even though design adaptations can be employed to improve this interaction, such as geometry optimization and use of higher-order modes, new strategies are necessary to further improve device performance. This study investigates the adoption of a different structure to serve as the platform for Multimode Interference sensing, the slot-waveguide. A Si\(_3\)N\(_4\) slot-waveguide on a SiO\(_2\) substrate is numerically modeled, and a demonstration is presented on how the low-index guiding mechanism allied with a careful selection of the propagating modes can be used for sensitivity enhancement. Optimized devices presented bulk sensitivities per sensor length up to 3.43 rad \(\cdot \) RIU\(^{-1} \cdot \) \(\mu \)m\(^{-1}\) (for 633 nm wavelength of operation), that when compared to the highest sensitivity MMI sensors in the literature represented roughly a 90% enhancement.

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Funding

This work was supported by Brazilian agency Fundação de Amparo à Pesquisa de Minas Gerais - FAPEMIG (under process number APQ-00822-19).

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  1. Department of Physics, Federal University of Minas Gerais - UFMG, Belo Horizonte, Minas Gerais, 31270-901, Brazil

    Yuri Hayashi Isayama

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YHI was the sole contributor to this work.

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Correspondence to Yuri Hayashi Isayama.

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Isayama, Y.H. Multimode Slot-Waveguide Sensor Using TE/TM Polarizations for Enhanced Sensitivity. Sens Imaging 24, 21 (2023). https://doi.org/10.1007/s11220-023-00430-9

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  • DOI: https://doi.org/10.1007/s11220-023-00430-9

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