The paper analyzes the structure of quasi-equiatomic nanocrystalline ceramic (NbMoCrTiAl)N and (TiNbZrTaHf)N coatings formed by plasma-assisted vacuum arc deposition from multicomponent gas-metal plasma through simultaneous evaporation of Nb, Mo, Cr, TiAl cathodes and TiNbZrTaHf cathode in an argon–nitrogen mixture. The analysis shows that in the (NbMoCrTiAl)N coating, metal mononitrides are formed by the mechanism of internal stress relaxation. In the (TiNbZrTaHf)N coating, such relaxation is provided by the formation of nanosized lamellae in its columnar structure.
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Ivanov, Y.F., Akhmadeev, Y.H., Koval, N.N. et al. Structure and Phase State of Ceramic High-Entropy Alloy Coatings Formed by Plasma-Assisted Vacuum Arc Deposition. Russ Phys J 66, 829–834 (2023). https://doi.org/10.1007/s11182-023-03011-1
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DOI: https://doi.org/10.1007/s11182-023-03011-1