The paper presents research results of Y–Al–O system-based coatings synthesized by cathodic-arc deposition simultaneously from two electric-arc evaporators with single-component Y and Al cathodes. Three different modes of annealing are used. After the deposition process, the coatings are annealed in a vacuum furnace at 800 and at 1200°C to identify the effect from the annealing temperature on the phase composition. The formation of the YAlO3 phase occurs in all annealing modes. More complex Y3Al5O12 and Y4Al2O9 oxides appear with increasing process temperature. According to the X-ray diffraction analysis, the process temperature and deposition mode affect the phase composition of the coating, which acquires the amorphous structure. The coating structure is studied on a scanning electron microscope. After 1200°C annealing, the coating sublayer diffusion occurs in the base material.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 107–115, November 2022
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Nazarov, A.Y., Khusainova, A.M., Maslov, A.A. et al. Effect of Coating Stoichiometry and Annealing on Phase Composition of Y–Al–O Compounds. Russ Phys J 65, 1908–1916 (2023). https://doi.org/10.1007/s11182-023-02850-2
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DOI: https://doi.org/10.1007/s11182-023-02850-2