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Structure and Phase Composition of Magnetronsputter-Deposited Corrosion Resistant Al–Si–N/Ni/Al–Si–N Coatings

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Russian Physics Journal Aims and scope

The paper studies the magnetron sputter-deposited multilayer, multicomponent Al–Si–N/Ni/Al–Si–N coating possessing higher corrosion resistance. Studied are the phase and elemental composition of the coating and its structural layers. It is found that all coating layers have a columnar structure. The structure of the Al–Si–N coating is nanocrystalline, while the structure of the nickel layer is finely crystalline. The X-ray diffraction (XRD) analysis shows that AlN and Si3N4 phases with the hexagonal closed packed crystal structure are present in the Al–Si–N layer, which is confirmed by the XRD patterns obtained on a transmission electron microscope. According to corrosion tests, the corrosion resistance of specimens coated by the Al–Si–N/Ni/Al–Si–N coating, is higher than that of uncoated specimens.

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Authors and Affiliations

  1. Institute of Strength Physics and Materials Science of the Siberian Branch of the Russian Academy of Sciences, Tomsk, Russia

    T. I. Dorofeeva, M. V. Fedorischeva, T. A. Gubaidulina, V. P. Sergeev, M. P. Kalashnikov & A. V. Voronov

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  1. T. I. Dorofeeva
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  2. M. V. Fedorischeva
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  3. T. A. Gubaidulina
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  4. V. P. Sergeev
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  5. M. P. Kalashnikov
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  6. A. V. Voronov
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Corresponding author

Correspondence to T. I. Dorofeeva.

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 8, pp. 69–75, August, 2022.

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Dorofeeva, T.I., Fedorischeva, M.V., Gubaidulina, T.A. et al. Structure and Phase Composition of Magnetronsputter-Deposited Corrosion Resistant Al–Si–N/Ni/Al–Si–N Coatings. Russ Phys J 65, 1311–1317 (2022). https://doi.org/10.1007/s11182-023-02767-w

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  • DOI: https://doi.org/10.1007/s11182-023-02767-w

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