The influence of conditions and parameters of synthesis of nitride coatings in low-pressure gas-metal plasma of low-pressure discharges on the coating properties have been studied. The influence of the enhanced concentration of the gas-metal plasma and of the arc discharge burning mode (stationary or pulse-periodic) with a cathode spot have been studied together with the influence of the conditions of heat removal from the target cathode on the number of microdroplets in coatings of a TiN system deposited on tool steel substrates. The number of microdroplets in the coating reduced by at least two times for the deposition in the pulseperiodic cathodic-arc discharge assisted by an additional gas plasma source.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 158–163, November, 2021.
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Savchuk, M.V., Denisov, V.V., Denisova, Y.A. et al. Influence of Conditions of the Electric Arc Discharge Burning on the Size of Microdroplet Fraction in a Nitride Coating. Russ Phys J 64, 2155–2161 (2022). https://doi.org/10.1007/s11182-022-02568-7
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DOI: https://doi.org/10.1007/s11182-022-02568-7