The paper studies the α-phase formation and structure of Al2O3 coatings deposited by the anodic arc evaporation in the low temperature range of 500–550°С. The current density of the ion assistance is varied up to 20 mA/cm2 and the ion energy ranges between 25–150 eV. The coating deposition rate is constant and equals 3 μm/h. The X-ray diffraction and infrared analyses are used to investigate the phase composition of the Al2O3 coating. It is found that the α-phase formation occurs at a 75–100 V bias voltage threshold, and the α-phase is stable within the limited range of the ion energy. The growth in the ion energy leads to the size reduction of the α-phase nanocrystallites and the coating amorphization. The coating structure is characterized by the crystallographic texture (300), which probably dominates due to the α-phase formation at the orientation ratio (440)γ-Al2O3/(300)α-Al2O3.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 10, pp. 144–150, October, 2020.
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Kamenetskikh, A.S., Gavrilov, N.V., Tretnikov, P.V. et al. Ion-Assisted α-Al2O3 Coating Deposition by Anodic Arc Evaporation at 500–550°С. Russ Phys J 63, 1797–1803 (2021). https://doi.org/10.1007/s11182-021-02236-2
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DOI: https://doi.org/10.1007/s11182-021-02236-2