The paper shows that the potential of isolated metal or dielectric target under electron-beam irradiation in medium vacuum can be estimated through measuring the parameters of beam plasma and the extent of the space-charge region between the target and beam plasma. This potential allows comparing the properties of the secondary electron emission from target materials.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
J. P. Sheehan and N. Hershkowitz, J. Vac. Sci. Technol. A, 30, 031302 (2012).
V. A. Burdovitsin, D. B. Zolotukhin, E. M. Oks, et al., Doklady tomskogo gosudarstvennogo universiteta sistem upravleniya i radioelektroniki, 20, No. 3, 65–70 (2017).
H. Chen, H. Gong, and C. K. Ong, J. Appl. Phys., 76, No. 2, 806–809 (1994).
M. Belhaj, O. Jbara, S. Odof, et al., Scanning, 22, 352–356 (2000).
V. A. Burdovitsin, A. V. Medovnik, E. M. Oks, et al., Tech. Phys. Russ. J. Appl. Phys., 82, No. 10, 1424–1429 (2012).
V. A. Burdovitsin and E. M. Oks, Laser Part. Beams, 26, No. 04, 619–635 (2008).
V. A. Burdovitsin, D. B. Zolotukhin, E. M. Oks, et al., J. Phys. D: Appl. Phys., 52, 285204 (2019).
M. A. Lieberman, Handbook of Plasma Immersion Ion Implantation and Deposition, Chapter 2, A. Anders, ed., Willey and Sons (2000).
V. A. Burdovitsin, E. M. Oks, and D. B. Zolotukhin, J. Phys. D: Appl. Phys., 51, 304006 (2018).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 46–49, November, 2019.
Rights and permissions
About this article
Cite this article
Burdovitsin, V.A., Oks, E.M. Space-Charge Region Near Dielectric Target Under Electron-Beam Irradiation. Russ Phys J 62, 2011–2014 (2020). https://doi.org/10.1007/s11182-020-01937-4
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11182-020-01937-4