The axial distribution of the ion mass-to-charge state in planar magnetron plasma has been studied. Copper is used as a target material, and argon was used as an operating gas. To study the ion mass-to-charge state, an upgraded quadrupole mass spectrometer was used. Measurements were carried out along the discharge system axis at a distance of 15 to 45 cm from the magnetron target. The operating pressure in a continuous mode was changed in the range from 1.2·10–3 to 3·10–3 Torr at discharge currents from 100 to 500 ma. It has been shown that at a distance of 15 cm from the magnetron, argon ions predominate in a fractional ratio. At the maximum distance, a significant copper ion fraction is observed. The fraction of argon ions decreases with increase in the discharge current and the operating pressure.
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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 11, pp. 30–33, November, 2019.
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Shandrikov, M.V., Artamonov, I.D., Vizir, A.V. et al. Axial Distribution of the Ion Mass-to-Charge State in a Magnetron Discharge Plasma. Russ Phys J 62, 1993–1997 (2020). https://doi.org/10.1007/s11182-020-01934-7
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DOI: https://doi.org/10.1007/s11182-020-01934-7