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Calculations of the chemical composition of helium–silane plasma

  • Plasma Physics
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Russian Physics Journal Aims and scope

A model describing the process of silane dissociation in a high-frequency helium plasma discharge is proposed. The concentrations of the silane dissociation products are calculated numerically, and the role of metastable helium atoms in the synthesis of film-forming radicals is analyzed.

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Authors and Affiliations

  1. F. M. Dostoevskii Omsk State University, Omsk, Russia

    V. I. Strunin, E. A. Kitaeva & G. Zh. Khudaybergenov

Authors
  1. V. I. Strunin
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  2. E. A. Kitaeva
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  3. G. Zh. Khudaybergenov
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Corresponding author

Correspondence to G. Zh. Khudaybergenov.

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 1, pp. 90–96, January, 2010.

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Strunin, V.I., Kitaeva, E.A. & Khudaybergenov, G.Z. Calculations of the chemical composition of helium–silane plasma. Russ Phys J 53, 98–105 (2010). https://doi.org/10.1007/s11182-010-9393-2

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  • DOI: https://doi.org/10.1007/s11182-010-9393-2

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