Skip to main content
SpringerLink
Log in

Erosion of the GaAs target under irradiation by a high-power pulsed ion beam

  • Physics of Semiconductors and Dielectrics
  • Published:
Russian Physics Journal Aims and scope

Abstract

The results of examination of the GaAs-target erosion under irradiation by a high-power pulsed ion beam are reported. In the experiments, use was made of a high-power pulsed ion source with the following parameters: ion energy — 250 keV, target current density — 350 A/cm2, pulse duration — 80 ns, target energy density — up to 7 J/cm2. The target erosion coefficient and its dependence on the number of successive pulses are measured. It is found that the surface roughness parameter is increased with the number of successive beam pulses. A regular structure of surface relief is observed to form in the case where the number of pulses > 20–40.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Y. Shimotory, M. Yokoyama, S. Harada, et al., J. Appl. Phys., 63, No. 3, 968–970 (1988).

    Article  ADS  Google Scholar 

  2. O. I. Goncharov, I. F. Isakov, V. N. Kolodii, et al., Beams ’90: Proc. 8th Int. Conf. on High Power Particle Beams, World Scientific, Teanack, New York, 2, 1243–1248 (1991).

    Google Scholar 

  3. G. E. Remnev, A. N. Zakutaev, Yu. F. Ivanov, et al., Pis’ma v Zh. Tekh. Fiz., 22, Vyp. 8, 68–72 (1996).

    Google Scholar 

  4. G. P. Jonstein et al., J. Apple Phys., 76, No. 10, 5649–5654 (1994).

    Google Scholar 

  5. T. J. Renk et al., Proceedings of the IEEE, 92, No. 7, 1057–1081 (2004).

    Article  Google Scholar 

  6. Li Tszen’ Fen’, G. E. Remnev, V. I. Gusel’nikov, et al., Proc. Int. Conf. on Interaction of Radiation with the Solid, Minsk, 2005.

  7. G. E. Remnev et al., J. Surface and Coating Technology, No. 96, 103–109 (1997).

  8. A. D. Korotaev, A. N. Tyumentsev, Yu. P. Pinzhin, and G. E. Remnev, Surface and Coating Technology, No. 185, 38–49 (2004).

  9. G. E. Remnev et al., Proc. 11th Int. Conf. on High Power Particle Beams (Beams’96), II, Prague, 1996.

Download references

Author information

Authors and Affiliations

  1. Tomsk Polytechnical University, Russia

    Li Tszen’ Fen’, G. E. Remnev, M. S. Saltymakov, V. I. Gusel’nikov & V. A. Makeev

  2. Tomsk State University, Russia

    I. V. Ivonin

  3. V. D. Kuznetsov Siberian Physical-Technical Institute at Tomsk State University, Russia

    E. P. Naiden

  4. Research Institute of Semiconductor Devices, Russia

    V. I. Yurchenko

Authors
  1. Li Tszen’ Fen’
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. G. E. Remnev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. S. Saltymakov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. I. Gusel’nikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. V. A. Makeev
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. I. V. Ivonin
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. E. P. Naiden
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. V. I. Yurchenko
    View author publications

    You can also search for this author in PubMed Google Scholar

Additional information

__________

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 1, pp. 66–70, January, 2007.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Fen’, L.T., Remnev, G.E., Saltymakov, M.S. et al. Erosion of the GaAs target under irradiation by a high-power pulsed ion beam. Russ Phys J 50, 66–70 (2007). https://doi.org/10.1007/s11182-007-0007-6

Download citation

  • Received:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11182-007-0007-6

Keywords

Search

Navigation