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Novel cross-linking monomer based on benzocyclobutene for an application in microelectronics

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Abstract

A new cross-linking monomer, allyl-bis(benzocyclobuten-4-yl)methylsilane (ABCBMS), was synthesized and its physical properties were investigated. Copolymers of ABCBMS with triethylene glycol dimethacrylate (TGM-3) and bis(methacryloylethylene glycol) carbonate (BMCC-2) were obtained by photo- and thermal polymerization. The final cross-linking of the copolymers took place at 200 °C. Homo- and copolymers of ABCBMS, ABCBMS-TGM-3 (50: 50) and ABCBMS—BMCC-2 (50: 50) exhibit high thermal stability (Td5% = 460, 359, and 352 °C, respectively) and good dielectric properties (ε = 2.7–2.8 and tg δ = (3.7–6.7)•10−4 at 10 GHz).

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Authors and Affiliations

  1. N. S. Enikolopov Institute of Synthetic Polymer Materials of Russian Academy of Sciences, 70 ul. Profsoyuznaya, 117393, Moscow, Russian Federation

    K. S. Levchenko

  2. Central Technological Research Institute “Technomash”, 4 ul. Ivana Franko, 121108, Moscow, Russian Federation

    G. E. Adamov, K. A. Chudov, P. S. Shmelin & E. P. Grebennikov

  3. State Space Corporation ROSCOSMOS, 53 ul. Aviamotornaya, 111250, Moscow, Russian Federation

    A. Yu. Kalashnikov

Authors
  1. K. S. Levchenko
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  2. G. E. Adamov
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  3. K. A. Chudov
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  4. P. S. Shmelin
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  5. A. Yu. Kalashnikov
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  6. E. P. Grebennikov
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Corresponding author

Correspondence to K. S. Levchenko.

Additional information

The work was financially supported by the Ministry of Research and Education of the Russian Federation (Agreement on the provision of grants from the federal budget in the form of subsidies dated November 22, 2019 No. 075-15-2019-1694; internal number of the Agreement 05.604.21.0227, unique identificator RFMEFI60419X0227).

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Levchenko, K.S., Adamov, G.E., Chudov, K.A. et al. Novel cross-linking monomer based on benzocyclobutene for an application in microelectronics. Russ Chem Bull 69, 2396–2400 (2020). https://doi.org/10.1007/s11172-020-3049-3

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  • DOI: https://doi.org/10.1007/s11172-020-3049-3

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