Thin carbon–copper layered films are sputtered using a dc magnetron unit. Transmission electron microscopy and electron diffraction are used to examine the structural evolution of the films in annealing at 600°C in vacuum. Two types of films are examined: two-layer carbon–copper and three-layer carbon–copper–carbon films. In annealing, the copper layers disintegrate, ensembles of copper particles form, and diffusion coalescence of particles in the two-layer film is observed. Hence, the density of copper particles decreases and their ensemble-average size increases. The coalescence in the two-layer film is slower than that predicted by theory because of the actual microstructure of quasiamorphous carbon substrate film. In the three-layer film, no coalescence is observed because of the specific morphologic and structural features of copper particles and carbon layers.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
E. Liu, B. Blanpain, X. Shi, et al., “Tribological behavior of different diamond-like carbon materials,” Surf. Coat. Technol., 106, 72–80 (1998).
C. Ronning, U. Griesmeier, M. Gross, et al., “Conduction processes in boron- and nitrogen-doped diamond-like carbon films prepared by mass-separated ion beam deposition,” Diamond Relat. Mater., 4, 666–672 (1995).
J. D. Carey and S. R. P. Silva, “Effects of nanoscale clustering in amorphous carbon,” in: G. Messina and S. Santangelo (eds.), Carbon: The Future Material for Advanced Technology Applications, Springer, Heidelberg, Berlin (2006), pp. 137–152.
T. I. T. Okpalugo, P. D. Maguire, A. A. Ogwu, and J. A. D. McLaughlin, “The effects of silicon doping and thermal annealing on the electrical and structural properties of hydrogenated amorphous carbon thin films,” Diamond Relat. Mater., 13, 1549–1552 (2004).
C. C. Chen and F. C. N. Hong, “Structure and properties of diamond-like carbon nanocomposite films containing copper nanoparticles,” Appl. Surf. Sci., 242, 261–269 (2005).
G. L. Doll, J. P. Heremans, T. A. Perry, and J. V. Mantese, “Optical and electronic properties of nitrogen-implanted diamond-like carbon films,” J. Mater. Res., 9, 85–90 (1994).
H. Hofsäss, H. Binder, T. Klumpp, and E. Recknagel, “Doping and growth of diamond-like carbon films by ion beam deposition,” Diamond Relat. Mater., 3, 137–142 (1993).
J. M. Ting and H. Lee, “DLC composite thin films by sputter deposition,” Diamond Relat. Mater., 11, 1119–1123 (2002).
Gy. J. Kovács, G. Sáfrán, et al., “Structure and mechanical properties of carbon-nickel and CN x –nickel nanocomposite films,” Surf. Coat. Technol., 180-181, 331–334 (2004).
D. Y. Wang, K. W. Weng, and S. Y. Hwang, “Study on metal-doped diamond-like carbon films synthesized by cathodic arc evaporation,” Diamond Relat. Mater., 9, 1762–1766 (2000).
K. I. Schiffmann, M. Fryda, G. Goerigk, et al., “Sizes and distances of metal clusters in Au, Pt-, W- and Fe-containing diamond-like carbon hard coatings: a comparative study by small angle X-ray scattering, wide angle X-ray diffraction, transmission electron microscopy and scanning tunneling microscopy,” Thin Sol. Films, 347, 60–71 (1999).
A. A. Voevodin, J. P. O’Neill, S. V. Prasad, and J. S. Zabinski, “Nanocrystalline WC and WC–a-C composite coatings produced from intersected plasma fluxes at low deposition temperatures,” J. Vac. Sci. Technol., A 17, 986–992 (1999).
Y. Pauleau and F. Thièry, “Deposition and characterization of nanostructured metal–carbon composite films,” Surf. Coat. Technol., 180–181, 313–322 (2004).
P. A. Chen, “Characteristics of copper-incorporated amorphous carbon film,” Thin Solid Films, 182, 261–263 (1989).
H. Dimigen and C.-P. Klages, “Microstructure and wear behavior of metal-containing diamond-like coatings,” Surf. Coat. Technol., 49, 543–547 (1991).
A. A. Onoprienko, N. I. Danilenko, and I. A. Kossko, “Structure evolution on annealing of copper-doped carbon films,” Thin Solid Films, 515, 6672–6675 (2007).
I. M. Lifshits and V. V. Slyozov, “The kinetics of precipitation from supersaturated solid solutions,” J. Phys. Chem. Sol., 19, 35–50 (1961).
A. A. Onoprienko, V. V. Artamonov, and I. B. Yanchuk, “Effect of magnetron discharge power on the resistivity and microstructure of carbon films,” Surf. Coat. Technol., 200, 4174–4178 (2006).
Ya. E. Geguzin, Yu. S. Kaganovsky, and V. V. Slyozov, “Determination of the surface heterodiffusion coefficient by the method of mass transfer,” J. Phys. Chem. Sol., 30, 1173–1178 (1969).
A. A. Onoprienko, V. V. Artamonov, and I. B. Yanchuk, “Effect of deposition and anneal temperature on the resistivity of magnetron sputtered carbon films,” Surf. Coat. Technol., 172, 189–193 (2003).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Poroshkovaya Metallurgiya, Vol. 48, No. 1–2 (465), pp. 119–127, 2009.
Rights and permissions
About this article
Cite this article
Onoprienko, A.A., Danilenko, N.I. Structural evolution in annealing of layered C–Cu composite films. Powder Metall Met Ceram 48, 93–99 (2009). https://doi.org/10.1007/s11106-009-9089-8
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11106-009-9089-8