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Characteristics of monolayer and multilayer titanium nitride plasmochemical coatings

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Abstract

Studies have been performed on the phase compositions, surface relief, adhesion, and mechanical properties of monolayer and multilayer coatings based on TiN and TiN-Ti-TiNO. Resistance tests to microabrasive wear have been made on these. Such wear on multilayer coatings is less by a factor 1.9 than on monolayer ones. Multilayer coatings of TiN-Ti-TiNO have high adhesion to silicon; a difference from monolayer coatings is that they are not subject to peeling with the maximum normal loading by a diamond indenter during nanoscratching. The coefficient of friction is 0.17 in diamond indenter scratching of monolayer and multilayer coatings.

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Translated from Poroshkovaya Metallurgiya, Nos. 11–12(452), pp. 48–54, November–December, 2006.

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Ivashchenko, L.A., Porada, O.K., Ivashchenko, V.I. et al. Characteristics of monolayer and multilayer titanium nitride plasmochemical coatings. Powder Metall Met Ceram 45, 547–552 (2006). https://doi.org/10.1007/s11106-006-0118-6

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  • DOI: https://doi.org/10.1007/s11106-006-0118-6

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