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Efficiency of Ozone Production in Coplanar Dielectric Barrier Discharge

Plasma Chemistry and Plasma Processing volume 39, pages 1227–1242 (2019)Cite this article

Abstract

Efficient generation of ozone by cold atmospheric plasmas is interesting for sterilisation and decontamination of thermally-sensitive surfaces. This paper presents a study of robust coplanar dielectric barrier discharge (DBD) for generating atmospheric pressure plasma in synthetic air and in oxygen. The atmospheric plasma generated by coplanar DBD in synthetic air showed considerably high ozone production of 2.41 g/h (2.25 slm, 45 W), while the production yield and energy cost were 54 g/kWh and 40.9 eV/molecule. The use of oxygen instead of synthetic air, at much lower discharge power (2.25 slm, 17 W), maintained the ozone production of 2.35 g/h, whereas the production yield significantly increased to 138 g/kWh with a corresponding energy cost of 12.9 eV/molecule. The temperature of coplanar DBD ceramics in synthetic air (45 W) and oxygen (17 W) plasma generation (continuous alternating-current operation) showed temperatures below 70 °C and 30 °C, respectively. The rotational temperatures obtained from optical emission spectroscopy indicated similar gas temperatures in the thin plasma layer close to the surface of the DBD ceramics. The low temperature of the plasma–ceramics interface evidences the applicability of coplanar DBD for the contact treatment of thermally sensitive surfaces where a high concentration of ozone is required.

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Acknowledgements

This research was supported by project ref CZ.1.05/2.1.00/03.0086, funded by the European Regional Development Fund; Project LO1411 (NPU I), funded by the Ministry of Education, Youth and Sports of the Czech Republic. B.P. and M.S. were supported by the Czech Science Foundation (Contract No. GA15-04023S).

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Authors and Affiliations

  1. R&D Center for Low-Cost Plasma and Nanotechnology Surface Modifications (CEPLANT), Department of Physical Electronics, Faculty of Science, Masaryk University, Kotlářská 267/2, 611 37, Brno, Czech Republic

    T. Homola & M. Zemánek

  2. Department of Pulse Plasma Systems, Institute of Plasma Physics v.v.i, Czech Academy of Sciences, Za Slovankou 3, 182 00, Prague, Czech Republic

    B. Pongrác & M. Šimek

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  1. T. Homola
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Homola, T., Pongrác, B., Zemánek, M. et al. Efficiency of Ozone Production in Coplanar Dielectric Barrier Discharge. Plasma Chem Plasma Process 39, 1227–1242 (2019). https://doi.org/10.1007/s11090-019-09993-6

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Keywords

  • Ozone generation
  • Dielectric barrier discharge
  • Cold plasma
  • Coplanar DBD
  • Low-temperature plasma