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Plasma Chemistry and Plasma Processing

, Volume 38, Issue 4, pp 903–916 | Cite as

Excitation of Electronic States of CO in Radio-Frequency Electric Field by Electron Impact

  • Miroslav M. Ristić
  • Muna M. Aoneas
  • Mirjana M. Vojnović
  • Sava M. D. Galijaš
  • Goran B. Poparić
Original Paper

Abstract

Electron impact excitation rate coefficients for singlet and triplet electronic states of the carbon monoxide molecule have been calculated under non-equilibrium conditions in the presence of radio-frequency electric field. A Monte Carlo simulation of electron transport has been performed in order to determine non-equilibrium electron energy distribution functions within one period of applied electric field. By using these distribution functions and corresponding cross sections, the excitation rate coefficients have been calculated for all electronic states of CO in the frequency range from 13.56 up to 500 MHz, at reduced root mean square electric field values ranging from 200 to 700 Td. We expect these rates to be valuable for modeling radio-frequency CO plasmas since excited neutrals exhibit greater chemical reactivity than neutrals in ground electronic state, hence altering many properties of plasma.

Keywords

CO molecule Rate coefficients Electronic states Electron impact Cross sections 

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Copyright information

© Springer Science+Business Media, LLC, part of Springer Nature 2018

Authors and Affiliations

  • Miroslav M. Ristić
    • 1
  • Muna M. Aoneas
    • 2
  • Mirjana M. Vojnović
    • 2
  • Sava M. D. Galijaš
    • 2
  • Goran B. Poparić
    • 2
  1. 1.Faculty of Physical ChemistryUniversity of BelgradeBelgradeSerbia
  2. 2.Faculty of PhysicsUniversity of BelgradeBelgradeSerbia

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