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DBD Plasma Treatment of Titanium in O2, N2 and Air

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Abstract

Dielectric Barrier Discharge plasma treatment of a titanium metal foil in oxygen, nitrogen and air under atmospheric conditions is investigated employing X-Ray Photoelectron Spectroscopy (XPS). We investigated three different reference samples and compare the results with a large number of studies on the XPS analysis of titanium compounds containing oxygen and nitrogen. The plasma treatment in all three different process gases leads to the formation of titanium dioxide films, while rather small nitrogen fractions are found after nitrogen and air plasma treatments. This finding is explained basing on plasma chemistry insight from the literature.

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Acknowledgments

We gratefully acknowledge the financial support by the Deutsche Forschungsgemeinschaft (DFG) under project numbers MA1893/18-1 and VI359/9-1.

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Authors and Affiliations

  1. Institut für Energieforschung und Physikalische Technologien, Technische Universität Clausthal, Leibnizstrasse 4, 38678, Clausthal-Zellerfeld, Germany

    S. Dahle, R. Gustus & W. Maus-Friedrichs

  2. Fakultät für Naturwissenschaften und Technik, Hochschule für Angewandte Wissenschaft und Kunst, Von-Ossietzky-Straße 99, 37085, Göttingen, Germany

    S. Dahle & W. Viöl

  3. Clausthaler Zentrum für Materialtechnik, Technische Universität Clausthal, Leibnizstrasse 4, 38678, Clausthal-Zellerfeld, Germany

    W. Maus-Friedrichs

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  1. S. Dahle
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  2. R. Gustus
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  4. W. Maus-Friedrichs
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Correspondence to W. Maus-Friedrichs.

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Dahle, S., Gustus, R., Viöl, W. et al. DBD Plasma Treatment of Titanium in O2, N2 and Air. Plasma Chem Plasma Process 32, 1109–1125 (2012). https://doi.org/10.1007/s11090-012-9392-x

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  • DOI: https://doi.org/10.1007/s11090-012-9392-x

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