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Oxidation Kinetics of Epitaxial (100) Copper Films at 25°C and 50°C

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Abstract

Very-thin-film kinetics data are presented for oxide growth on parent epitaxially formed (100) copper crystals at 25 and 50°C with different oxygen pressures in the range 0.01 torr to 170 torr. The results are interpreted in terms of the model based on electric-field driven ionic diffusion associated with the electrostatic-potential difference created by an electron-tunnel- current-virtual equilibrium.

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REFERENCES

  1. R. F. Tylecote, Journal of the Institute of Metals 78, 259 (1950).

    Google Scholar 

  2. F. W. Young, Jr., J. V. Cathcart, and A. T. Gwathmey, Acta Metallurgica 4, 145 (1956).

    Google Scholar 

  3. A. Rönnquist and H. Fischmeister, Journal of the Institute of Metals 89, 65 (1960).

    Google Scholar 

  4. K. R. Lawless, Reports on Progress in Physics 37, 231 (1974).

    Google Scholar 

  5. T. N. Rhodin, Jr., Journal of American Chemical Society 72, 5102 (1950).

    Google Scholar 

  6. T. N. Rhodin, Jr., Journal of American Chemical Society 73, 3143 (1951).

    Google Scholar 

  7. P. K. Krishnamoorthy and S. C. Sircar, Journal of the Electrochemical Society 116, 734 (1969).

    Google Scholar 

  8. P. K. Krishnamoorthy and S. C. Sircar, Oxidation of Metals 2, 349 (1970).

    Google Scholar 

  9. J. C. Yang, D. Evan, and L. Tropia, Applied Physics Letter 81, 241 (2002).

    Google Scholar 

  10. A. T. Fromhold, Jr., Journal of Physics and Chemistry of Solids 33, 95 (1972).

    Google Scholar 

  11. A. T. Fromhold, Jr., Theory of Metal Oxidation. Vol. I-Fundamentals (North-Holland Publishing Company, Amsterdam, 1976).

    Google Scholar 

  12. A. T. Fromhold, Jr., Journal of the Physical Society of Japan 48, 2022 (1980).

    Google Scholar 

  13. N. F. Mott, Transactions of the Faraday Society 35, 1175 (1939).

    Google Scholar 

  14. N. F. Mott, Transactions of the Faraday Society 43, 429 (1947).

    Google Scholar 

  15. N. F. Mott, Transactions of the Faraday Society 36, 472 (1940).

    Google Scholar 

  16. N. Cabrera and N. F. Mott, Reports on Progress in Physics 12, 163 (1949).

    Google Scholar 

  17. K. Heinemann, D. B. Rao, and D. L. Douglass, Oxidation of Metals 9, 379 (1975).

    Google Scholar 

  18. A. T. Fromhold, Jr. and E. L. Cook, Journal of Applied Physics 38, 1546 (1967).

    Google Scholar 

  19. E. J. W. Verwey, Physica 2, 1059 (1935).

    Google Scholar 

  20. A. T. Fromhold, Jr. and E. L. Cook, Physical Review 158, 600 (1967).

    Google Scholar 

  21. A. T. Fromhold, Jr. Quantum Mechanics for Applied Physics and Engineering (Academic Press, NY, 1981; Dover Publications, Inc., NY, 1991), p. 246ff.

    Google Scholar 

  22. A. T. Fromhold, Jr., and E. L. Cook, Physical Review 163, 650 (1967).

    Google Scholar 

  23. A. T. Fromhold, Jr., and E. L. Cook, Physical Review 175, 877 (1968).

    Google Scholar 

  24. A. T. Fromhold, Jr., Theory of Metal Oxidation. Vol. II-Space Charge (North-Holland Publishing Company, Amsterdam, 1980).

    Google Scholar 

  25. M. Abramowitz and L. A. Stegun, eds., Handbook of Mathematical Functions, National Bureau of Standards Applied Mathematics Series, No. 55 (U.S. Government Printing Office, Washington, DC), ch. 5.

  26. J. W. Matthews and E. Grunbaum, Applied Physics Letters 5, 106 (1964).

    Google Scholar 

  27. F. L. McCrackin, A Fortran Program for Analysis of Ellipsomter Measurements (NBS Technnical Note 479, 1968).

  28. G. Zhou and J. C. Yang, Applied Surface Science 210, 165 (2003).

    Google Scholar 

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Fromhold, A.T., Anderson, M.H. Oxidation Kinetics of Epitaxial (100) Copper Films at 25°C and 50°C. Oxidation of Metals 62, 237–272 (2004). https://doi.org/10.1007/s11085-004-7810-z

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  • DOI: https://doi.org/10.1007/s11085-004-7810-z

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