Abstract
FinFET Structure is proposed as a nanophotonic platform to guide and control light. The hybrid plasmonic mode is made to guide in the dielectric layer around the silicon fin (channel). We are able to guide and control both TE and TM modes in the proposed structure which provides improved electrostatic control over the channel where the gate is wrapped around the Fin. By utilizing the gate and drain–source voltages we can control the charge carriers in the channel thereby realizing phase tuning. In addition, a voltage tunable absorption is also reported through the voltage variable imaginary part of the effective index. The proposed device can be well suited for applications in photonic devices at real nanoscales.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
Data and materials availability
The data sets generated during and/or analyzed during the current study are available from the corresponding author on reasonable request.
References
Alam, M.Z., Aitchison, J.S., Mojahedi, M.: Theoretical analysis of hybrid plasmonic waveguide. IEEE J. Sel. Top. Quantum Electron. 19(3), 4602008 (2013). https://doi.org/10.1109/JSTQE.2013.2238894
Alam, M.Z., Aitchison, J.S., Mojahedi, M.: A marriage of convenience: Hybridization of surface plasmon and dielectric waveguide modes. Laser Photon. Rev. 8(3), 394–408 (2014). https://doi.org/10.1002/lpor.201300168
Barnes, W.L., et al.: Optical excitation of surface plasmons : an introduction. Nature 424, 37–41 (2013)
Barrios, C.A., Rosa De Almeida, V., Lipson, M.: Low-power-consumption short-length and high-modulation-depth silicon electrooptic modulator. J. Light. Technol. 21(4), 1089 (2003). https://doi.org/10.1109/JLT.2003.810090
Boardman, A.D.: Electromagnetic surface modes. Wiley, Chichester, New York (1982)
Chee, J., Zhu, S., Lo, G.Q.: CMOS compatible polarization splitter using hybrid plasmonic waveguide. Opt. Express 20(23), 25345–25355 (2012). https://doi.org/10.1364/OE.20.025345
Colinge, J.P., Chandrakasan, A.: FinFETs and other multi-gate transistors, pp. 1–340. Springer, Boston (2008). https://doi.org/10.1007/978-0-387-71752-4
Dai, D., He, S.: A silicon-based hybrid plasmonic waveguide with a metal cap for a nano-scale light confinement. Opt. Express 17(19), 16646 (2009). https://doi.org/10.1364/oe.17.016646
Dastmalchi, P., Haddadpour, A., Veronis, G.: Nanophotonics: devices for manipulating light at the nanoscale. In: Feldman, M. (ed.) Nanolithography: the art of fabricating nanoelectronic and nanophotonic devices and systems, pp. 376–398. Elsevier, Cambridge, Ltd (2013)
Fang, Y., Sun, M.: Nanoplasmonic waveguides: towards applications in integrated nanophotonic circuits. Light Sci. Appl 4(6), 1–11 (2005). https://doi.org/10.1038/lsa.2015.67
Frank, D.J., Dennard, R.H., Nowak, E., Solomon, P.M., Taur, Y., Wong, H.S.P.: Device scaling limits of Si MOSFETs and their application dependencies. Proc. IEEE 89(3), 259–287 (2001). https://doi.org/10.1109/5.915374
Gaynor, B.D., Hassoun, S.: Fin shape impact on FinFET leakage with application to multithreshold and ultralow-leakage FinFET design. IEEE Trans. Electron Devices 61(8), 2738–2744 (2014). https://doi.org/10.1109/TED.2014.2331190
Gramotnev, D.K., Bozhevolnyi, S.I.: Plasmonics beyond the diffraction limit. Nat. Photonics 4(2), 83–91 (2010). https://doi.org/10.1038/nphoton.2009.282
Guillorn, M., et al. (2008) 2.1 FinFET Performance Advantage at 22nm: An AC perspective
Hisamoto, D., et al.: FinFET—a self-aligned double-gate MOSFET scalable to 20 nm. IEEE Trans. Electron Devices 47(12), 2320–2325 (2000). https://doi.org/10.1109/16.887014
Jain, S., Rajput, S., Kaushik, V., Sulabh, Kumar, M.: Efficient optical modulation with high data-rate in silicon based laterally split vertical p-n junction. IEEE J. Quantum Electron. 56(2), 1–7 (2020). https://doi.org/10.1109/JQE.2020.2966781
Jogi, A., Singh, L., Kaushik, V., Dev, R., Sai, M., Mukesh, K.: Electrically tunable nanophotonic switch based on graphene—silicon hybrid ring resonator. Appl. Phys. B 128(12), 1–6 (2022). https://doi.org/10.1007/s00340-022-07943-3
Johnson, P.B., Christy, R.W.: Optical constants of the noble metals. Phys. Rev. B 6(12), 4370–4379 (1972). https://doi.org/10.1103/PHYSREVB.6.4370
Kaushik, V., et al.: On-chip nanophotonic broadband wavelength detector with 2D-electron gas nanophotonic platform for wavelength detection in visible spectral region. Nanophotonics 11(2), 289–296 (2022). https://doi.org/10.1515/nanoph-2021-0365
King, T. J., (2005) FinFETs for nanoscale CMOS digital integrated circuits. In: IEEE/ACM ICCAD-2005. IEEE/ACM International Conference on Computer-Aided Design. 2005: 207–210. https://doi.org/10.1109/ICCAD.2005.1560065
Kou, Y., Ye, F., Chen, X.: Low-loss hybrid plasmonic waveguide for compact and high-efficient photonic integration. Opt. Express 19(12), 11746 (2011). https://doi.org/10.1364/oe.19.011746
Kumar, S., Kumar, P., Ranjan, R.: A metal-cap wedge shape hybrid plasmonic waveguide for nano-scale light confinement and long propagation range. Plasmonics 17(1), 95–105 (2022). https://doi.org/10.1007/S11468-021-01502-W
Kumar, S., Kumar, P., Ranjan, R.: Triangular shape hybrid metal-insulator-metal plasmonic waveguide for low propagation loss at deep subwavelength. IEEE Trans. Nanotechnol. 21, 6–15 (2022). https://doi.org/10.1109/TNANO.2021.3130796
Kumar, S., et al.: Numerical analysis of laterally and vertically coupled hybrid plasmonic modes in silicon tip. Plasmonics 17, 1699–1707 (2022). https://doi.org/10.1007/s11468-022-01657-0
Lipson, M.: Guiding, modulating, and emitting light on Silicon - Challenges and opportunities. J. Lightwave Technol. 23(12), 4222–4238 (2005). https://doi.org/10.1109/JLT.2005.858225
Lou, F., Dai, D., Wosinski, L.: Ultracompact polarization beam splitter based on a dielectric–hybrid plasmonic–dielectric coupler. Opt. Lett. 37(16), 3372–3374 (2012). https://doi.org/10.1364/OL.37.003372
Ma, Z., Tahersima, M.H., Khan, S., Sorger, V.J.: Two-dimensional material-based mode confinement engineering in electro-optic modulators. IEEE J. Sel. Top. Quantum Electron. 23(1), 3400208 (2016). https://doi.org/10.1109/JSTQE.2016.2574306
Mishra, R.D., Singh, L., Rajput, S., Kaushik, V., Srivastava, S., Kumar, M.: Engineered nanophotonic waveguide with ultra-low dispersion. Appl. Opt. 60(16), 4732–4737 (2021). https://doi.org/10.1364/ao.428534
Mishra, R.D., et al.: Comb-like hybrid plasmonic ring resonator for large and voltage tunable group delay. IEEE Trans. Nanotechnol. 22, 166–171 (2023). https://doi.org/10.1109/TNANO.2023.3259006
Oulton, R.F., Sorger, V.J., Genov, D.A., Pile, D.F.P., Zhang, X.: A hybrid plasmonic waveguide for subwavelength confinement and long-range propagation. Nat. Photonics. 2(8), 496–500 (2008). https://doi.org/10.1038/nphoton.2008.131
Pandey, S.K., Rajput, S., Kaushik, V., Babu, P., Dev Mishra, R., Kumar, M.: Electrically tunable plasmonic absorber based on Cu-ITO subwavelength grating on SOI at telecom wavelength. Plasmonics 17, 1709–1716 (2022). https://doi.org/10.1007/s11468-022-01658-z
Pei, G., Kedzierski, J., Oldiges, P., Ieong, M., Kan, E.C.C.: FinFET design considerations based on 3-D simulation and analytical modeling. IEEE Trans. Electron Devices 49(8), 1411–1419 (2002). https://doi.org/10.1109/TED.2002.801263
Rajput, S., Kaushik, V., Jain, S., Kumar, M.: Slow light enhanced phase shifter based on low-loss silicon-ITO hollow waveguide. IEEE Photon. J. 11(1), 1–8 (2019). https://doi.org/10.1109/JPHOT.2019.2895699
Rajput, S., Kaushik, V., Jain, S., Tiwari, P., Srivastava, A.K., Kumar, M.: Optical modulation in hybrid waveguide based on Si-ITO heterojunction. J. Light. Technol. 38(6), 1365–1371 (2020). https://doi.org/10.1109/JLT.2019.2953690
Rajput, S., Kaushik, V., Babu, P., Tiwari, P., Srivastava, A.K., Kumar, M.: Optical modulation via coupling of distributed semiconductor heterojunctions in a Si-ITO-Based Subwavelength Grating. Phys. Rev. Appl. 15(5), 054029 (2021). https://doi.org/10.1103/PhysRevApplied.15.054029
Reed, G.T., Mashanovich, G., Gardes, F.Y., Thomson, D.J.: Silicon optical modulators. Nat. Photon. 4(8), 518–526 (2010). https://doi.org/10.1038/nphoton.2010.179
Rybin, M.V., Samusev, K.B., Lukashenko, S.Y., Kivshar, Y.S., Limonov, M.F.: Transition from two-dimensional photonic crystals to dielectric metasurfaces in the optical diffraction with a fine structure. Sci. Rep. 6(1), 30773 (2016). https://doi.org/10.1038/srep30773
Singh, L., Sharma, T., Kumar, M.: Controlled hybridization of plasmonic and optical modes for low-loss nano-scale optical confinement with ultralow dispersion. IEEE J. Quantum Electron. 54(2), 7200105 (2018). https://doi.org/10.1109/JQE.2018.2809461
Singh, L., Tidke, S., Kumar, M.: Guiding and controlling light at nanoscale in field effect transistor. Appl. Phys. B 125, 89 (2019). https://doi.org/10.1007/s00340-019-7202-3
Singh, L., Srivastava, S., Rajput, S., Kaushik, V., Mishra, R.D., Kumar, M.: Optical switch with ultra high extinction ratio using electrically controlled metal diffusion. Opt. Lett. 46(11), 2626–2629 (2021). https://doi.org/10.1364/ol.428710
Steinberger, B., et al.: Dielectric stripes on gold as surface plasmon waveguides. Appl. Phys. Lett. 88(9), 1–4 (2006). https://doi.org/10.1063/1.2180448
S. H. Tang et al. (2001) FinFET—A quasi-planar double-gate MOSFET. In: Digest of technical papers ieee international solid-state circuits conference. 118–119+437. https://doi.org/10.1109/ISSCC.2001.912568.
Thomson, D., et al.: Roadmap on silicon photonics. J. Opt. (united Kingdom) 18(7), 1–20 (2016). https://doi.org/10.1088/2040-8978/18/7/073003
Wang, J.: A review of recent progress in plasmon-assisted nanophotonic devices. Front. Optoelectron. 7(3), 320–337 (2014). https://doi.org/10.1007/s12200-014-0469-4
Walsh, S. T., Boylan, R. L., McDermott, C., & Paulson, A.: The semiconductor silicon industry roadmap: Epochs driven by the dynamics between disruptive technologies and core competencies. Technol. Forecast. Soc. Change. 72 (2), 213–236 (2005). https://doi.org/10.1016/S0040-1625(03)00066-0
West, P.R., Ishii, S., Naik, G.V., Emani, N.K., Shalaev, V.M., Boltasseva, A.: Searching for better plasmonic materials. Laser Photon. Rev. 4(6), 795–808 (2010). https://doi.org/10.1002/lpor.200900055
Yu, B., et al. (2002) FinFET scaling to 10 nm gate length. In: Tech. Dig.—Int. Electron Devices Meet. pp. 251–254, https://doi.org/10.1109/IEDM.2002.1175825
Zhu, H., Hao, R., Li, E.: Ridge waveguide assisted highly efficient transverse-electric-pass polarizer based on a hybrid plasmonic waveguide. Appl. Opt. 57(19), 5533–5537 (2018). https://doi.org/10.1364/AO.57.005533
Acknowledgements
The authors acknowledge project grant from Science and Engineering Research Board (SERB), Government of India and from Council of Scientific and Industrial Research (CSIR).
Funding
The work is supported by Council of Scientific and Industrial Research (CSIR) with grant no. 22(0840)/20/EMR-II and from Science and Engineering Research Board (SERB) with grant no. CRG/2020/000144.
Author information
Authors and Affiliations
Contributions
Saikiran and M. Kumar conceptualized the device and conducted a theoretical analysis. Numerical analysis was carried out by Saikiran, R.D. Mishra, S. Kumar, Aditya and L. Singh and provided partial technical suggestions and help in finalizing the manuscript. M. Kumar guided the entire computation process. Saikiran and M. Kumar conducted the data analysis and wrote the manuscript.
Corresponding author
Ethics declarations
Conflict of interest
Not applicable.
Ethical approval
Not applicable.
Additional information
Publisher's Note
Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
Rights and permissions
Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
About this article
Cite this article
Kiran, S., Mishra, R.D., Kumar, S. et al. Nano-scale optical guidance and control in finfet like structure. Opt Quant Electron 55, 811 (2023). https://doi.org/10.1007/s11082-023-05057-4
Received:
Accepted:
Published:
DOI: https://doi.org/10.1007/s11082-023-05057-4